Narrow surface transient and high depth resolution SIMS using 250 eV O 2 +

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 7243-7246

  Chanbasha, Ab Razak ^a   Wee, A T S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Depth resolution; Roughening; Secondary ion mass spectroscopy; Ultralow energy

Indexed keywords

ION BEAMS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WELLS; SPUTTERING; SURFACE ROUGHNESS;

DEPTH RESOLUTION; PRIMARY IONS; ROUGHENING; ULTRALOW ENERGY;

SEMICONDUCTOR JUNCTIONS;

EID: 33747201119     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.198     Document Type: Article

References (15)

1. Dowsett M.G., Ormsby T.J., Gard F.S., Al Harthi S.H., Guzman B., McConville C.F., Noakes T.C.Q., and Bailey P. Appl. Surf. Sci. 203 (2003) 363-366
2. Wittmaack K. Philos. Trans. R. Soc. Lond. Ser. A: Math. Phys. Eng. Sci. 354 (1996) 2731-2764
3. Alkemade P.F.A., Jiang Z.X., Visser C.C.G., Radelaar S., and Arnoldbik W.M. J. Vac. Sci. Technol. B 16 (1998) 373-376
4. Jiang Z.X., Alkemade P.F.A., Algra E., and Radelaar S. Surf. Interf. Anal. 25 (1997) 285-291
5. Dowsett M.G. Appl. Surf. Sci. 203 (2003) 5-12
6. Liu R., Wee A.T.S., Shen D.H., and Takenaka H. Surf. Interf. Anal. 36 (2004) 172-176
7. Dowsett M.G., Ormsby T.J., Cooke G.A., and Chu D.P. J. Vac. Sci. Technol. B 16 (1998) 302-305
8. Liu R., Ng C.M., and Wee A.T.S. Appl. Surf. Sci. 203 (2003) 256-259
9. Maul J.L., and Patel S.B. In: Gillen G., Lareau R., Bennett J., and Stevie F. (Eds). Secondary Ion Mass Spectrometry SIMS. Part XI (1998), Wiley, Chichester 707
10. Dowsett M.G., Ormsby T.J., Ellinet D.I., and Cooke G.A. In: Gillen G. (Ed). Secondary Ion Mass Spectrometry SIMS. Part XI (1998), Wiley, Chichester 371
11. Chanbasha A.R., and Wee A.T.S. Surf. Interf. Anal. 37 (2005) 628-632
12. Wittmaack K. Surf. Interf. Anal. 24 (1996) 389-398
13. Clegg J.B., and Gale I.L. Surf. Interf. Anal. 17 (1991) 190-196
14. Ormsby T.J., Chu D.P., Dowsett M.G., Cooke G.A., and Patel S.B. Appl. Surf. Sci. 145 (1999) 292-296
15. Jiang Z.X., Lerma J., Sieloff D., Lee J.J., Backer S., Bagchi S., and Conner J. J. Vac. Sci. Technol. B 22 (2004) 630-635