Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument

Applied Surface Science

Volumn 231-232, Issue , 2004, Pages 954-958

  Merkulov, A ^a   Merkulova, O ^b   De Chambost, E ^a   Schuhmacher, M ^a  

^a CAMECA   (United States)

^b PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

Depth profile; Depth scale calibration; Laser interferometer; SIMS

Indexed keywords

COMPUTER SIMULATION; INTERFACES (MATERIALS); INTERFEROMETERS; LASER BEAMS; LIGHT REFLECTION; MULTILAYERS; PHASE SHIFT;

DEPTH PROFILE; DEPTH SCALE CALIBRATION; LASER INTERFEROMETER; REFLECTED BEAMS;

SECONDARY ION MASS SPECTROMETRY;

EID: 2942590447     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.186     Document Type: Conference Paper

References (4)

1. J. Kempf, in: Proceedings of the Second International Conference on SIMS, vol. 9, Springer Ser. Chem. Phys., 1979.
2. De Chambost E., Monsallut P., Rasser B., Schuhmacher M. Appl. Surf. Sci. 203/204:2003;391-395.
3. J. Dyson, Interferometry as a Measuring Tool, The Machinery Publishing Co. Ltd., 1970.
4. Konnerth K.L., Dill F.H. Solid State Electron. 15:1972;371.