Depth profiling using ultra-low-energy secondary ion mass spectrometry

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 5-12

  Dowsett, M G ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Capping; Instrumentation; Ultra low energy SIMS; Ultra shallow profiling

Indexed keywords

EXTRAPOLATION; INTERFACES (MATERIALS); SECONDARY ION MASS SPECTROMETRY;

DEPTH PROFILING;

ION BEAMS;

EID: 0037438051     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00630-X     Document Type: Conference Paper

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