On determining accurate positions, separations, and internal profiles for delta layers

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 273-276

  Dowsett, M G ^a   Kelly, J H ^a   Rowlands, G ^a   Ormsby, T J ^a   Guzman B ^b   Augustus, P ^c   Beanland, R ^c  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^c Marconi Caswell Ltd   (United Kingdom)

Author keywords

Delta layers; Depth calibration; Profile shifts; SIMS response function

Indexed keywords

CALIBRATION; FUNCTIONS; ION BEAMS; PARAMETER ESTIMATION; TRANSMISSION ELECTRON MICROSCOPY;

DELTA LAYERS;

SECONDARY ION MASS SPECTROMETRY;

EID: 12244303615     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00646-3     Document Type: Conference Paper

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