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Volumn 17, Issue 1, 1998, Pages 29-44

Use of post-ionisation techniques to complement SIMS analysis. A review with practical aspects

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; SECONDARY ION MASS SPECTROMETRY;

EID: 0031652548     PISSN: 03346455     EISSN: None     Source Type: Journal    
DOI: 10.1515/HTMP.1998.17.1-2.29     Document Type: Review
Times cited : (10)

References (84)
  • 15
    • 0003937665 scopus 로고
    • SIMS - Secondary Ion Mass Spectrometry
    • O'Connor, D.J. Sexton and R.S.C. Smart, Editors, Springer, Berlin
    • R.J. MacDonald and B.V. King, SIMS - Secondary Ion Mass Spectrometry, in Surface Analysis Methods in Materials Science, O'Connor, D.J. Sexton and R.S.C. Smart, Editors, Springer, Berlin, p. 117, 1992.
    • (1992) Surface Analysis Methods in Materials Science , pp. 117
    • MacDonald, R.J.1    King, B.V.2
  • 19
    • 0028447144 scopus 로고
    • P.C. Zalm, Vacuum 45, 753 (1994).
    • (1994) Vacuum , vol.45 , pp. 753
    • Zalm, P.C.1
  • 23
    • 11544366953 scopus 로고
    • Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds. John Wiley & Sons
    • E. Niehuis in SIMS IX. 1993, Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds. John Wiley & Sons, 429.
    • (1993) SIMS IX , pp. 429
    • Niehuis, E.1
  • 26
    • 0039652901 scopus 로고
    • Secondary Neutral Mass Spectrometry (SNMS) and its Application to Depth Profile and Interface Analysis
    • H. Oechsner, Editor, Springer, Berlin
    • H. Oechsner, Secondary Neutral Mass Spectrometry (SNMS) and its Application to Depth Profile and Interface Analysis, in Thin Film and Depth Profile Analysis, H. Oechsner, Editor, Springer, Berlin, p. 63, 1984.
    • (1984) Thin Film and Depth Profile Analysis , pp. 63
    • Oechsner, H.1
  • 27
    • 0344775798 scopus 로고
    • Sputtered Neutral Mass Spectrometry
    • D. Briggs and M.P. Seah, Editors, Wiley & Sons, Chichester
    • R. Jede, O. Ganschow and U. Kaiser, Sputtered Neutral Mass Spectrometry, in Practical Surface Analysis, D. Briggs and M.P. Seah, Editors, Wiley & Sons, Chichester, p. 425, 1992.
    • (1992) Practical Surface Analysis , pp. 425
    • Jede, R.1    Ganschow, O.2    Kaiser, U.3
  • 29
    • 11544260201 scopus 로고
    • Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds. John Wiley & Sons
    • H. Oechsner in SIMS IX. 1993, Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds. John Wiley & Sons, 316.
    • (1993) SIMS IX , pp. 316
    • Oechsner, H.1
  • 30
    • 11544267575 scopus 로고
    • Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds., John Wiley & Sons
    • K. Wittmaack in SIMS IX. 1993, Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds., John Wiley & Sons, 309.
    • (1993) SIMS IX , pp. 309
    • Wittmaack, K.1
  • 40
    • 0242326372 scopus 로고
    • A. Benninghoven, R.J. Colton, D.S. Simons and H.W. Werner, eds., Springer N.Y.
    • E. Niehuis, T. Heller, H. Feld and A. Benninghoven in SIMS V. 1985, A. Benninghoven, R.J. Colton, D.S. Simons and H.W. Werner, eds., Springer N.Y., 188.
    • (1985) SIMS V , pp. 188
    • Niehuis, E.1    Heller, T.2    Feld, H.3    Benninghoven, A.4
  • 47
    • 0004003678 scopus 로고
    • The Application of Mass Spectroscopy to the Study of Surfaces and Sputtering
    • J.D. Waldron, Editor, Pergamon Press, London
    • R.E. Honig, The Application of Mass Spectroscopy to the Study of Surfaces and Sputtering, in Advances in Mass Spectroscopy, J.D. Waldron, Editor, Pergamon Press, London, p. 162, 1959.
    • (1959) Advances in Mass Spectroscopy , pp. 162
    • Honig, R.E.1
  • 63
    • 84886473106 scopus 로고
    • Münster, A. Benninghoven, B. Hagenhoff, H.W. Werner, eds., John Wiley & Sons
    • H.F. Arlinghaus, C.F. Joyner, J. Tower and S. Sen in SIMS X. 1995, Münster, A. Benninghoven, B. Hagenhoff, H.W. Werner, eds., John Wiley & Sons, 463.
    • (1995) SIMS X , pp. 463
    • Arlinghaus, H.F.1    Joyner, C.F.2    Tower, J.3    Sen, S.4
  • 64
    • 11544326159 scopus 로고
    • Münster, A. Benninghoven, B. Hagenhoff, H.W. Werner, eds., John Wiley & Sons
    • H.F. Arlinghaus, T.J. Whitaker and C.F. Joyner in SIMS X. 1995, Münster, A. Benninghoven, B. Hagenhoff, H.W. Werner, eds., John Wiley & Sons, 839.
    • (1995) SIMS X , pp. 839
    • Arlinghaus, H.F.1    Whitaker, T.J.2    Joyner, C.F.3
  • 65
    • 11544365055 scopus 로고
    • Münster, A. Benninghoven, B. Hagenhoff and H.W. Werner, eds., John Wiley & Sons
    • P.D. Bisschop, J. Gomez and W. Vandervorst in SIMS X. 1995, Münster, A. Benninghoven, B. Hagenhoff and H.W. Werner, eds., John Wiley & Sons, 793.
    • (1995) SIMS X , pp. 793
    • Bisschop, P.D.1    Gomez, J.2    Vandervorst, W.3
  • 67
    • 11544284184 scopus 로고
    • Ion Spectroscopy for Surface Analysis
    • A. W. Czanderna, Editor, Plenum Press, New York, ch. 4
    • C.H. Becker, Ion Spectroscopy for Surface Analysis, in Methods of Surface Characterization, A. W. Czanderna, Editor, Plenum Press, New York, ch. 4, 1990.
    • (1990) Methods of Surface Characterization
    • Becker, C.H.1
  • 70
    • 11544348593 scopus 로고
    • Amsterdam, A. Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons
    • M. Terhorst, G. Kampwerth, E. Niehuis and A. Benninghoven in SIMS VIII. 1991, Amsterdam, A. Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons, 567.
    • (1991) SIMS VIII , pp. 567
    • Terhorst, M.1    Kampwerth, G.2    Niehuis, E.3    Benninghoven, A.4
  • 71
    • 0003776069 scopus 로고    scopus 로고
    • Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds., John Wiley & Sons
    • M. Terhorst, R. Möllers, A. Schnieders, E. Niehuis and A. Benninghoven in SIMS IX. 1993, Yokohama, A. Benninghoven, Y. Nihei, R. Shimizu and H.W. Werner, eds., John Wiley & Sons, 434.
    • (1993) SIMS IX , pp. 434
    • Terhorst, M.1    Möllers, R.2    Schnieders, A.3    Niehuis, E.4    Benninghoven, A.5
  • 72
    • 11544341603 scopus 로고
    • Amsterdam, A Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons
    • S. Hayashi and Y. Hashiguchi in SIMS VIII. 1991, Amsterdam, A Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons, 575.
    • (1991) SIMS VIII , pp. 575
    • Hayashi, S.1    Hashiguchi, Y.2
  • 73
    • 84989017593 scopus 로고
    • Amsterdam, A. Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons
    • G. Kampwerth, M. Terhorst, E. Niehuis and A. Benninghoven in SIMS VIII. 1991, Amsterdam, A. Benninghoven, K.T.F. Janssen, J. Tümpner and H.W. Werner, eds., John Wiley & Sons, 563.
    • (1991) SIMS VIII , pp. 563
    • Kampwerth, G.1    Terhorst, M.2    Niehuis, E.3    Benninghoven, A.4
  • 82
    • 84914779641 scopus 로고
    • Münster, A. Benninghovea, B. Hagenhoff and H.W. Werner, eds., John Wiley & Sons
    • H.F. Willey, C.L. Brummel and N. Winograd in SIMS X. 1995, Münster, A. Benninghovea, B. Hagenhoff and H.W. Werner, eds., John Wiley & Sons, 797.
    • (1995) SIMS X , pp. 797
    • Willey, H.F.1    Brummel, C.L.2    Winograd, N.3
  • 84
    • 11544347219 scopus 로고
    • PhD. Thesis, Technical University Clausthal/Germany
    • H. Schoof, PhD. Thesis, 1981, Technical University Clausthal/Germany.
    • (1981)
    • Schoof, H.1


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