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Photochemistry and Photophysics of Polymer Materials

Volumn , Issue , 2010, Pages 479-507

Photoimaging and Lithographic Processes in Polymers

(2) Ivan, Marius G a Scaiano, Juan Cesar Tito a

a UNIVERSITY OF OTTAWA (Canada)

Author keywords

Chemically amplified photoresists; Polymer photoimaging and lithographic processes; Polymers for deep UV, vacuum UV and extreme UV photolithography

Indexed keywords

EID: 84864344907 PISSN: None EISSN: None Source Type: Book
DOI: 10.1002/9780470594179.ch12 Document Type: Chapter

Times cited : (34)

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