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Volumn 16, Issue 6, 1998, Pages 3767-3772

On-wafer photoacid determination and imaging technique for chemically amplified photoresists

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000266595     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590404     Document Type: Article
Times cited : (18)

References (26)
  • 21
    • 11744355136 scopus 로고    scopus 로고
    • Ph.D. dissertation, University of Wisconsin-Madison
    • P. M. Dentinger, Ph.D. dissertation, University of Wisconsin-Madison, 1998.
    • (1998)
    • Dentinger, P.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.