Lithographic Imaging Techniques for the Formation of Nanoscopic Features

Chemical Reviews

Volumn 99, Issue 7, 1999, Pages 1801-1821

  Wallraff, G M ^a   Hinsberg, W D ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001001627     PISSN: 00092665     EISSN: None     Source Type: Journal    
DOI: 10.1021/cr980003i     Document Type: Article

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