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Volumn 25, Issue 18, 2004, Pages 1628-1631

Mapping acid-catalyzed deprotection in thin polymer films: Fluorescence imaging using prefluorescent 7-hydroxycoumarin probes

Author keywords

Lithography; Photochemistry; Photoresists

Indexed keywords

CATALYSIS; DYES; FLUORESCENCE; SENSORS; THIN FILMS;

EID: 5444273803     PISSN: 10221336     EISSN: None     Source Type: Journal    
DOI: 10.1002/marc.200400209     Document Type: Article
Times cited : (34)

References (28)
  • 28
    • 85009418557 scopus 로고    scopus 로고
    • note
    • -2) and baked for 60 s at 90°C


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.