Organic materials challenges for 193 nm imaging

Accounts of Chemical Research

Volumn 32, Issue 8, 1999, Pages 659-667

  Reichmanis, Elsa ^a   Nalamasu, Omkaram ^a   Houlihan, Frank M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ORGANIC COMPOUND; POLYMER;

ANALYTIC METHOD; CHEMICAL STRUCTURE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PROTECTION; REVIEW; STRUCTURE ANALYSIS;

EID: 0032841905     PISSN: 00014842     EISSN: None     Source Type: Journal    
DOI: 10.1021/ar970150n     Document Type: Review

References (50)

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