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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3332-3339

Polymer photochemistry at advanced optical wavelengths

(5) Fedynyshyn, Theodore H a Kunz, Roderick R a Sinta, Roger F a Goodman, Russell B a Doran, Scott P a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; ESTERS; GEL PERMEATION CHROMATOGRAPHY; INTEGRATED CIRCUIT MANUFACTURE; ORGANIC POLYMERS; PHOTOCHEMICAL REACTIONS; PHOTOLYSIS; POLYMETHYL METHACRYLATES; POLYSTYRENES; SILICON WAFERS;

POLYMER PHOTOCHEMISTRY;

PHOTOLITHOGRAPHY;

EID: 0034317717 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1318186 Document Type: Article

Times cited : (46)

References (12)

1
- 11744307460
- T. M. Bloomstein, M. Rothschild, R. R. Kunz, D. E. Hardy, R. B. Goodman, and S. T. Palmacci, J. Vac. Sci. Technol. B 16, 3154 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.16 , pp. 3154
- Bloomstein, T.M.¹ Rothschild, M.² Kunz, R.R.³ Hardy, D.E.⁴ Goodman, R.B.⁵ Palmacci, S.T.⁶

2
- 0033262709
- M. Rothschild et al., J. Vac. Sci. Technol. B 17, 3262 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3262
- Rothschild, M.¹

3
- 0032675485
- R. R. Kunz, T. M. Bloomstein, D. E. Hardy, R. B. Goodman, D. K. Downs, and J. E. Curtin, Proc. SPIE 3678, 13 (1999).
- (1999) Proc. SPIE , vol.3678 , pp. 13
- Kunz, R.R.¹ Bloomstein, T.M.² Hardy, D.E.³ Goodman, R.B.⁴ Downs, D.K.⁵ Curtin, J.E.⁶

4
- 0033269286
- R. R. Kunz, T. M. Bloomstein, D. E. Hardy, R. B. Goodman, D. K. Downs, and J. E. Curtin, J. Vac. Sci. Technol. B 17, 3267 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3267
- Kunz, R.R.¹ Bloomstein, T.M.² Hardy, D.E.³ Goodman, R.B.⁴ Downs, D.K.⁵ Curtin, J.E.⁶

5
- 0002082712
- Mid-Hudson Society
- R. G. Tarascon, E. Reichmanis, F. Houlihan, A. Shugard, and L. F. Thompson, Proceedings of the Regional Technical Conference of the Society of Plastic Engineers, Mid-Hudson Society, 1988, Vol. 8, p. 12.
- (1988) Proceedings of the Regional Technical Conference of the Society of Plastic Engineers , vol.8 , pp. 12
- Tarascon, R.G.¹ Reichmanis, E.² Houlihan, F.³ Shugard, A.⁴ Thompson, L.F.⁵

6
- 24044544925
- J. W. Thackeray, G. W. Orsula, E. K. Pavelchek, D. Canistro, L. E. Bogan, A. K. Berry, and K. A. Graziano, Proc. SPIE 1086, 34 (1989).
- (1989) Proc. SPIE , vol.1086 , pp. 34
- Thackeray, J.W.¹ Orsula, G.W.² Pavelchek, E.K.³ Canistro, D.⁴ Bogan, L.E.⁵ Berry, A.K.⁶ Graziano, K.A.⁷

7
- 0026438635
- Y. Kaimoto, K. Nozaki, S. Takechi, and N. Abe, Proc. SPIE 1672, 66 (1992).
- (1992) Proc. SPIE , vol.1672 , pp. 66
- Kaimoto, Y.¹ Nozaki, K.² Takechi, S.³ Abe, N.⁴

8
- 2842567164
- R. R. Kunz, R. D. Allen, W. D. Hinsberg, and G. M. Wallraff, Proc. SPIE 1925, 167 (1993).
- (1993) Proc. SPIE , vol.1925 , pp. 167
- Kunz, R.R.¹ Allen, R.D.² Hinsberg, W.D.³ Wallraff, G.M.⁴

9
- 0029727825
- R. D. Allen et al., Proc. SPIE 2724, 334 (1996).
- (1996) Proc. SPIE , vol.2724 , pp. 334
- Allen, R.D.¹

10
- 0029727391
- T. I. Wallow, F. M. Houlihan, O. Nalamasu, E. A. Chandross, T. X. Neenan, and E. Reichmanis, Proc. SPIE 2724, 355 (1996).
- (1996) Proc. SPIE , vol.2724 , pp. 355
- Wallow, T.I.¹ Houlihan, F.M.² Nalamasu, O.³ Chandross, E.A.⁴ Neenan, T.X.⁵ Reichmanis, E.⁶

11
- 0040707402
- R. R. Kunz and D. K. Downs, J. Vac. Sci. Technol. B 17, 3330 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3330
- Kunz, R.R.¹ Downs, D.K.²

12
- 0032662161
- F. M. Houlihan et al., Proc. SPIE 3678, 264 (1999).
- (1999) Proc. SPIE , vol.3678 , pp. 264
- Houlihan, F.M.¹

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