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Angewandte Chemie (International Edition in English)

Volumn 35, Issue 21, 1996, Pages 2428-2440

Novolak-diazoquinone resists: The imaging systems of the computer chip

(4) Reiser, Arnost a Shih, Hsiao Yi a Yeh, Tung Feng b Huang, Jian Ping c

a POLYTECHNIC UNIVERSITY (United States)

b POLAROID CORPORATION (United States)

c LORD CORPORATION (United States)

Author keywords

Diazonaphthoquinones; Microlithography; Novolak resists; Percolation theory; Photographic materials

Indexed keywords

EID: 0030471037 PISSN: 05700833 EISSN: None Source Type: Journal
DOI: 10.1002/anie.199624281 Document Type: Article

Times cited : (70)

References (17)

1
- 85033029935
- Kalle AG, DBP. 879205, 1949
- Kalle AG, DBP. 879205, 1949.

2
- 85033006868
- Azoplate Corp., US-Pat. 2766118, 1956; US-A 3046122, 1962
- Azoplate Corp., US-Pat. 2766118, 1956; US-A 3046122, 1962.

3
- 0003937505
- SPIE Press, Tutorial Text No. 11, Bellingham, WA
- R. R. Dammel, Diazonaphthoquinone-based Resists, SPIE Press, Tutorial Text No. 11, Bellingham, WA 1993.
- (1993) Diazonaphthoquinone-based Resists
- Dammel, R.R.¹

4
- 84958685078
- O. Süs, Justus Liebigs Ann. Chem. 1944, 556, 65; ibid. 1947, 557 (2), 237; O.Süs, J. Munder, H. Stephan, Angew. Chem. 1962, 74, 985.
- (1944) Justus Liebigs Ann. Chem. , vol.556 , pp. 65
- Süs, O.¹

5
- 15744366306
- O. Süs, Justus Liebigs Ann. Chem. 1944, 556, 65; ibid. 1947, 557 (2), 237; O.Süs, J. Munder, H. Stephan, Angew. Chem. 1962, 74, 985.
- (1947) Justus Liebigs Ann. Chem. , vol.557 , Issue.2 , pp. 237

6
- 15744387999
- O. Süs, Justus Liebigs Ann. Chem. 1944, 556, 65; ibid. 1947, 557 (2), 237; O.Süs, J. Munder, H. Stephan, Angew. Chem. 1962, 74, 985.
- (1962) Angew. Chem. , vol.74 , pp. 985
- Süs, O.¹ Munder, J.² Stephan, H.³

7
- 0006779066
- K. Ueberreiter, F. Asmussen, J. Polym. Sci. 1962, 57, 187.
- (1962) J. Polym. Sci. , vol.57 , pp. 187
- Ueberreiter, K.¹ Asmussen, F.²

8
- 15744385018
- W. D. Hinsberg, M. L. Guttierez, SPIE Annu. Tech. Symp. Proc. 15th 1984, 469, 57.
- (1984) SPIE Annu. Tech. Symp. Proc. 15th , vol.469 , pp. 57
- Hinsberg, W.D.¹ Guttierez, M.L.²

9
- 0023642013
- M. K. Templeton, C. R. Szmanda, A. Zampini, SPIE Annu. Tech. Symp. Proc. 15th 1987, 771, 136.
- (1987) SPIE Annu. Tech. Symp. Proc. 15th , vol.771 , pp. 136
- Templeton, M.K.¹ Szmanda, C.R.² Zampini, A.³

10
- 17044410680
- C. M. Garza, C. R. Szmanda, R. L. Fischer, SPIE Annu. Tech. Symp. Proc. 15th 1988, 920, 321.
- (1988) SPIE Annu. Tech. Symp. Proc. 15th , vol.920 , pp. 321
- Garza, C.M.¹ Szmanda, C.R.² Fischer, R.L.³

11
- 15744401537
- M. Hanabata, Y. Uetani, A. Furuta, SPIE Annu. Tech. Symp. Proc. 15th 1988, 925, 340.
- (1988) SPIE Annu. Tech. Symp. Proc. 15th , vol.925 , pp. 340
- Hanabata, M.¹ Uetani, Y.² Furuta, A.³

12
- 0039503202
- M. Koshiba, M. Murata, M. Matsui, SPIE Annu. Tech. Symp. Proc. 15th 1988, 929, 364.
- (1988) SPIE Annu. Tech. Symp. Proc. 15th , vol.929 , pp. 364
- Koshiba, M.¹ Murata, M.² Matsui, M.³

13
- 60849132354
- M. Murata, M. Koshiba, Y. Harita, SPIE Annu. Tech. Symp. Proc. 15th 1989, 1086, 48.
- (1989) SPIE Annu. Tech. Symp. Proc. 15th , vol.1086 , pp. 48
- Murata, M.¹ Koshiba, M.² Harita, Y.³

14
- 0026923068
- T. F. Yeh, H. S. Shih, A. Reiser, Macromolecules 1992, 25, 5345.
- (1992) Macromolecules , vol.25 , pp. 5345
- Yeh, T.F.¹ Shih, H.S.² Reiser, A.³

15
- 0024753917
- J. P. Huang, T. K. Kwei, A. Reiser, Macromolecules 1989, 22, 4106.
- (1989) Macromolecules , vol.22 , pp. 4106
- Huang, J.P.¹ Kwei, T.K.² Reiser, A.³

16
- 0022897613
- R. A. Arcus, SPIE Annu. Tech. Symp. Proc. 15th 1986, 631, 124.
- (1986) SPIE Annu. Tech. Symp. Proc. 15th , vol.631 , pp. 124
- Arcus, R.A.¹

17
- 0027627416
- T. F. Yeh, A. Reiser, R. R. Dammel, G. Pawlowski, H. Roeschert, Macromolecules 1993, 26, 3862.
- (1993) Macromolecules , vol.26 , pp. 3862
- Yeh, T.F.¹ Reiser, A.² Dammel, R.R.³ Pawlowski, G.⁴ Roeschert, H.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.