Comparison of fabrication methods of sub-100 nm nano-optical structures and devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5925, Issue , 2005, Pages 1-15

  Hoffmann, Patrik ^a   Utke, Ivo ^a   Perentes, Alexandre ^a   Bret, Tristan ^a   Santschi, Christian ^a   Apostolopoulos, Vasilis ^a  

^a EPFL   (Switzerland)

Author keywords

Electron Beam Lithography; FEB deposition; FIB machining; Fluorescence correlation spectroscopy; Lift off; Nano optics; Sub wavelength apertures

Indexed keywords

CORRELATION METHODS; ETCHING; FLUORESCENCE; NANOSTRUCTURED MATERIALS; REFRACTION; SUBSTRATES;

FLUORESCENCE CORRELATION SPECTROSCOPY; PHOTONIC CRYSTALS STRUCTURES;

OPTICAL DEVICES;

EID: 31844453837     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617142     Document Type: Conference Paper

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