Nanofabrication of high refractive index contrast two-dimensional photonic crystal waveguides

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 670-675

  Todaro, M T ^a   Stomeo, T ^a   Vitale, V ^a   DeVittorio, M ^a   Passaseo, A ^a   Cingolani, R ^a   Romanato, F ^b   Businaro, L ^b   Di Fabrizio, E ^b  

^a INFM   (Italy)

^b LABORATORIO TASC   (Italy)

Author keywords

GaAs AlGaAs; Oxidation; Photonic crystal; Waveguide

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALS; HETEROJUNCTIONS; NANOTECHNOLOGY; OXIDATION; PHOTONS; REFRACTIVE INDEX; SEMICONDUCTING GALLIUM ARSENIDE;

PHOTONIC CRYSTALS;

OPTICAL WAVEGUIDES;

EID: 0037682246     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00173-4     Document Type: Conference Paper

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