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Volumn 2, Issue 2, 2003, Pages 117-121

Microassembly of semiconductor three-dimensional photonic crystals

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; OPTOELECTRONIC DEVICES; SCANNING ELECTRON MICROSCOPY;

EID: 0037317814     PISSN: 14761122     EISSN: None     Source Type: Journal    
DOI: 10.1038/nmat802     Document Type: Article
Times cited : (284)

References (44)
  • 1
    • 33745947692 scopus 로고
    • Inhibited spontaneous emission in solid-state physics and electronics
    • Yablonovitch, E. Inhibited spontaneous emission in solid-state physics and electronics. Phys. Rev. Lett. 58, 2059-2062 (1987).
    • (1987) Phys. Rev. Lett. , vol.58 , pp. 2059-2062
    • Yablonovitch, E.1
  • 2
    • 26544437684 scopus 로고
    • Strong localization of photons in certain disordered dielectric supirlattices
    • John, S. Strong localization of photons in certain disordered dielectric supirlattices. Phys. Rev. Lett. 58, 2486-2489 (1987).
    • (1987) Phys. Rev. Lett. , vol.58 , pp. 2486-2489
    • John, S.1
  • 3
    • 0000679514 scopus 로고    scopus 로고
    • Novel surface emitting laser diode using photonic band-gap crystal cavity
    • Hirayama, H., Hatnano, T., & Aoyagi, Y. Novel surface emitting laser diode using photonic band-gap crystal cavity. Appl. Phys. Lett. 69, 791-793 (1996).
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 791-793
    • Hirayama, H.1    Hatnano, T.2    Aoyagi, Y.3
  • 4
    • 1842405373 scopus 로고    scopus 로고
    • Photonic crystals: Putting a new twist on light
    • Joannopoulos, J. D., Villeneuve, P. R. & Fan, S. Photonic crystals: Putting a new twist on light. Nature 386, 143-149 (1997).
    • (1997) Nature , vol.386 , pp. 143-149
    • Joannopoulos, J.D.1    Villeneuve, P.R.2    Fan, S.3
  • 5
    • 0030258283 scopus 로고    scopus 로고
    • All-silica single-mode optical fiber with photonic crystal cladding
    • Knight, J. C., Birks, T. A., Russell, P. St. J. & Atkin, D. M. All-silica single-mode optical fiber with photonic crystal cladding. Opt. Lett. 21, 1547-1549 (1996).
    • (1996) Opt. Lett. , vol.21 , pp. 1547-1549
    • Knight, J.C.1    Birks, T.A.2    Russell, P.St.J.3    Atkin, D.M.4
  • 6
    • 0029805080 scopus 로고    scopus 로고
    • Two-dimensional photonic-bandgap structures operating at near-infrared wavelengths
    • Krauss, T. F., De La Rue, R. M. & Brand, S. Two-dimensional photonic-bandgap structures operating at near-infrared wavelengths. Nature 383, 699-702 (1996).
    • (1996) Nature , vol.383 , pp. 699-702
    • Krauss, T.F.1    De La Rue, R.M.2    Brand, S.3
  • 7
    • 0001125518 scopus 로고    scopus 로고
    • Quantitative measurement of transmission, reflection, and diffraction of two-dimensional photonic band gap structures at near-infrared wavelengths
    • Labilloy, D. et al. Quantitative measurement of transmission, reflection, and diffraction of two-dimensional photonic band gap structures at near-infrared wavelengths. Phys. Rev. Lett. 79, 4147-4150 (1997).
    • (1997) Phys. Rev. Lett. , vol.79 , pp. 4147-4150
    • Labilloy, D.1
  • 8
    • 0032500723 scopus 로고    scopus 로고
    • Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal
    • Lin, S. Y., Chow, E., Hietala, V., Villeneuve, P. R. & Joannopoulos, J. D. Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal. Science 282, 274-276 (1998).
    • (1998) Science , vol.282 , pp. 274-276
    • Lin, S.Y.1    Chow, E.2    Hietala, V.3    Villeneuve, P.R.4    Joannopoulos, J.D.5
  • 9
    • 0032650908 scopus 로고    scopus 로고
    • Observation of light propagation in photonic crystal optical waveguides with bends
    • Baba, T., Fukaya, N. & Yonekura, J. Observation of light propagation in photonic crystal optical waveguides with bends. Electron. Lett. 35, 654-655 (1999).
    • (1999) Electron. Lett. , vol.35 , pp. 654-655
    • Baba, T.1    Fukaya, N.2    Yonekura, J.3
  • 10
    • 45849154750 scopus 로고    scopus 로고
    • Extremely large group-velocity dispersion of line-defect waveguides in photonic crystal slabs
    • Notomi, M. et al. Extremely large group-velocity dispersion of line-defect waveguides in photonic crystal slabs, phys. Rev. Lett. 87, 253902 (2001).
    • (2001) Phys. Rev. Lett. , vol.87 , pp. 253902
    • Notomi, M.1
  • 11
    • 0036469627 scopus 로고    scopus 로고
    • Fabrication and characterization of different types of two-dimensional AlGaAs photonic crystal slabs
    • Sugimoto, Y. et al. Fabrication and characterization of different types of two-dimensional AlGaAs photonic crystal slabs. J. Appl. Phys. 91, 922-929 (2002).
    • (2002) J. Appl. Phys. , vol.91 , pp. 922-929
    • Sugimoto, Y.1
  • 12
    • 0033546064 scopus 로고    scopus 로고
    • Two-dimensional photonic band-gap defect mode laser
    • Painter, O.et al. Two-dimensional photonic band-gap defect mode laser. Science 284, 1819-1821 (1999).
    • (1999) Science , vol.284 , pp. 1819-1821
    • Painter, O.1
  • 13
    • 0035839134 scopus 로고    scopus 로고
    • Polarization mode control of two-dimensional photonic crystal laser by unit cell structure design
    • Noda, S., Yokoyama, M., Imada, M., Chutinan, A. & Mochizuki, M. Polarization mode control of two-dimensional photonic crystal laser by unit cell structure design. Science 293, 1123-1125 (2001).
    • (2001) Science , vol.293 , pp. 1123-1125
    • Noda, S.1    Yokoyama, M.2    Imada, M.3    Chutinan, A.4    Mochizuki, M.5
  • 14
    • 0031556601 scopus 로고    scopus 로고
    • Demonstration of cavity mode between two-dimensional photonic-crystal mirrors
    • Labilloy, D. et al. Demonstration of cavity mode between two-dimensional photonic-crystal mirrors. Electron. Lett. 33, 1978-1980 (1997).
    • (1997) Electron. Lett. , vol.33 , pp. 1978-1980
    • Labilloy, D.1
  • 15
    • 0034609841 scopus 로고    scopus 로고
    • Trapping and emission of photons by a single defect in a photonic bandgap structure
    • Noda, S., Chutinan, A. & Imada, M. Trapping and emission of photons by a single defect in a photonic bandgap structure. Nature 407, 608-610 (2000).
    • (2000) Nature , vol.407 , pp. 608-610
    • Noda, S.1    Chutinan, A.2    Imada, M.3
  • 16
    • 5244300724 scopus 로고
    • Donor and acceptor modes in photonic band structure
    • Yablonovitch, E. et al. Donor and acceptor modes in photonic band structure. Phys. Rev. Lett. 67, 3380-3383(1991).
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 3380-3383
    • Yablonovitch, E.1
  • 17
    • 0029405339 scopus 로고
    • Fabrication of photonic band-gap crystals
    • Cheng, C. C. & Scherer, A. Fabrication of photonic band-gap crystals. J. Vac. Sci. Technol. B 13, 2696-2700(1995).
    • (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2696-2700
    • Cheng, C.C.1    Scherer, A.2
  • 18
    • 0000292010 scopus 로고    scopus 로고
    • Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macropourous silicon
    • Chelnokov, A., Wang, K., Rowson, S., Garoche, P. & Lourtioz, J. M. Near-infrared Yablonovite-like photonic crystals by focused-ion-beam etching of macropourous silicon. Appl. Phys. Lett. 77, 2943-2945 (2000).
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 2943-2945
    • Chelnokov, A.1    Wang, K.2    Rowson, S.3    Garoche, P.4    Lourtioz, J.M.5
  • 19
    • 0034713259 scopus 로고    scopus 로고
    • Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres
    • Blanco, A. et al. Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres. Nature 405, 437-440 (2000).
    • (2000) Nature , vol.405 , pp. 437-440
    • Blanco, A.1
  • 20
    • 0035891246 scopus 로고    scopus 로고
    • On-chip natural assembly of silicon photonic bandgap crystals
    • Vlasov, Y. A., Bo, X. Z., Sturm, J. C. & Norris, D. J. On-chip natural assembly of silicon photonic bandgap crystals. Nature 414, 289-293 (2001).
    • (2001) Nature , vol.414 , pp. 289-293
    • Vlasov, Y.A.1    Bo, X.Z.2    Sturm, J.C.3    Norris, D.J.4
  • 21
    • 0001059982 scopus 로고    scopus 로고
    • Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin
    • Sun, H. B., Matsuo, S. & Misawa, H. Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin. Appl. Phys. Lett. 74, 786-788 (1999).
    • (1999) Appl. Phys. Lett. , vol.74 , pp. 786-788
    • Sun, H.B.1    Matsuo, S.2    Misawa, H.3
  • 22
    • 0034594907 scopus 로고    scopus 로고
    • Fabrication of photonic crystals for the visible spectrum by holographic lithography
    • Campbell, M., Sharp, D. N., Harrison, M. T., Denning, R. G. & Turberfield, A. J. Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature 404, 53-56 (2000).
    • (2000) Nature , vol.404 , pp. 53-56
    • Campbell, M.1    Sharp, D.N.2    Harrison, M.T.3    Denning, R.G.4    Turberfield, A.J.5
  • 23
    • 0346614037 scopus 로고    scopus 로고
    • Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerization resin
    • Shoji, S. & Kawata, S. Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerization resin. Appl. Phys. Lett. 76, 2668-2670 (2000).
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 2668-2670
    • Shoji, S.1    Kawata, S.2
  • 24
    • 0028374710 scopus 로고
    • Photonic band gaps in three dimensions: New layer-by-layer periodic structures
    • Ho, K. M., Chan, C. T., Soukoulis, C. M., Biswas, R. & Sigalas, M. Photonic band gaps in three dimensions: New layer-by-layer periodic structures. Solid State Commun. 89, 413-416 (1994).
    • (1994) Solid State Commun. , vol.89 , pp. 413-416
    • Ho, K.M.1    Chan, C.T.2    Soukoulis, C.M.3    Biswas, R.4    Sigalas, M.5
  • 25
    • 0001015766 scopus 로고
    • Measurement of a three-dimensional photonic band gap in a crystal structure made of dielectric rods
    • Özbay, E. et al. Measurement of a three-dimensional photonic band gap in a crystal structure made of dielectric rods. Phys. Rev. B 50, 1945-1948 (1994).
    • (1994) Phys. Rev. B , vol.50 , pp. 1945-1948
    • Özbay, E.1
  • 27
    • 0032537772 scopus 로고    scopus 로고
    • A three-dimensional photonic crystal operating at infrared wavelengths
    • Lin, S. Y. et al. A three-dimensional photonic crystal operating at infrared wavelengths. Nature 394, 251-253 (1998).
    • (1998) Nature , vol.394 , pp. 251-253
    • Lin, S.Y.1
  • 28
    • 0034725930 scopus 로고    scopus 로고
    • Full three-dimensional photonic bandgap crystals at near-infrared wavelengths
    • Noda, S., Tomoda, K., Yamamoto, N. & Chutinan, A. Full three-dimensional photonic bandgap crystals at near-infrared wavelengths. Science 289, 604-606 (2000).
    • (2000) Science , vol.289 , pp. 604-606
    • Noda, S.1    Tomoda, K.2    Yamamoto, N.3    Chutinan, A.4
  • 29
    • 0000438792 scopus 로고    scopus 로고
    • Chalcogenide glass-based three-dimensional photonic crystals
    • Feigel, A. et. al. Chalcogenide glass-based three-dimensional photonic crystals. Appl. Phys. Lett. 77, 3221-3223 (2000).
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 3221-3223
    • Feigel, A.1
  • 30
    • 0037007644 scopus 로고    scopus 로고
    • All-metallic three-dimensional photonic crystals with a large infrared bandgap
    • Fleming, J. G., Lin, S. Y., El-Kady, I., Biswas, R. & Ho, K. M. All-metallic three-dimensional photonic crystals with a large infrared bandgap. Nature 417, 52-55 (2002).
    • (2002) Nature , vol.417 , pp. 52-55
    • Fleming, J.G.1    Lin, S.Y.2    El-Kady, I.3    Biswas, R.4    Ho, K.M.5
  • 31
    • 79955989508 scopus 로고    scopus 로고
    • Three-dimensional photonic crystals for optical wavelengths assembled by micromanipulation
    • Aoki, K. et al. Three-dimensional photonic crystals for optical wavelengths assembled by micromanipulation. Appl. Phys. Lett. 81, 3122-3124 (2002).
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 3122-3124
    • Aoki, K.1
  • 33
    • 0001486878 scopus 로고    scopus 로고
    • Photonic band in two-dimensional lattices of micrometer-sized spheres mechanically arranged under a scanning electron microscope
    • Miyazaki, H. T., Miyazaki, H., Ohtaka, K., & Sato, T. Photonic band in two-dimensional lattices of micrometer-sized spheres mechanically arranged under a scanning electron microscope, J. Appl. Phys. 87, 7152-7158 (2000).
    • (2000) J. Appl. Phys. , vol.87 , pp. 7152-7158
    • Miyazaki, H.T.1    Miyazaki, H.2    Ohtaka, K.3    Sato, T.4
  • 36
    • 0001130994 scopus 로고    scopus 로고
    • Adhesion of micrometer-sized polymer particles under a scanning electron microscope
    • Miyazaki, H. T., Tomizawa, Y., Saito, S., Sato, T., & Shinya, N. Adhesion of micrometer-sized polymer particles under a scanning electron microscope. J. Appl. Phys. 88, 3330-3340 (2000).
    • (2000) J. Appl. Phys. , vol.88 , pp. 3330-3340
    • Miyazaki, H.T.1    Tomizawa, Y.2    Saito, S.3    Sato, T.4    Shinya, N.5
  • 37
    • 18744402803 scopus 로고    scopus 로고
    • Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope
    • Saito, S., Miyazaki, H. T., Sato, T. & Takahashi, K. Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope. J. Appl. Phys. 92, 5140-5149 (2002).
    • (2002) J. Appl. Phys. , vol.92 , pp. 5140-5149
    • Saito, S.1    Miyazaki, H.T.2    Sato, T.3    Takahashi, K.4
  • 38
    • 4544320782 scopus 로고
    • Defect structures in a layer-by-layer photonic band-gap crystal
    • Ozbay, E., Tuttle, G., Sigalas, M., Soukoulis, C. M. & Ho, K. M. Defect structures in a layer-by-layer photonic band-gap crystal. Phys. Rev. B51, 13961-13965 (1995).
    • (1995) Phys. Rev. B , vol.51 , pp. 13961-13965
    • Ozbay, E.1    Tuttle, G.2    Sigalas, M.3    Soukoulis, C.M.4    Ho, K.M.5
  • 40
    • 0035878522 scopus 로고    scopus 로고
    • Terahertz time-domain study of a pseudo-simple-cubic photonic lattice
    • Aoki, T. et al. Terahertz time-domain study of a pseudo-simple-cubic photonic lattice. Phys. Rev. B64, 45106 (2001).
    • (2001) Phys. Rev. B , vol.64 , pp. 45106
    • Aoki, T.1
  • 41
    • 33744690365 scopus 로고
    • Transmittance and Bragg reflectivity of two-dimensional photonic lattices
    • Sakoda, K. Transmittance and Bragg reflectivity of two-dimensional photonic lattices. Phys. Rev. B52, 8992-9002 (1995).
    • (1995) Phys. Rev. B , vol.52 , pp. 8992-9002
    • Sakoda, K.1
  • 43
    • 0035476128 scopus 로고    scopus 로고
    • The little machines that are making it big
    • Bishop, D., Gammel, P. & Giles, C. R. The little machines that are making it big. Phys. Today 54, 38-44 (2001).
    • (2001) Phys. Today , vol.54 , pp. 38-44
    • Bishop, D.1    Gammel, P.2    Giles, C.R.3
  • 44
    • 0037118962 scopus 로고    scopus 로고
    • Nanorobotic manipulation of microspheres for on-chip diamond architectures
    • Garcla-Santamaría, F. et al. Nanorobotic manipulation of microspheres for on-chip diamond architectures. Adv. Mater. 14, 1144-1147 (2002).
    • (2002) Adv. Mater. , vol.14 , pp. 1144-1147
    • Garcla-Santamaría, F.1


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