Nanostructuring lithium niobate substrates by focused ion beam milling

Optical Materials

Volumn 27, Issue 8, 2005, Pages 1421-1425

  Lacour, F ^a   Courjal, N ^a   Bernal, M P ^a   Sabac, A ^a   Bainier, C ^a   Spajer, M ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Focused ion beam; Lithium niobate; Nano structuring; Reactive ion etching

Indexed keywords

COMMINUTION; CRYSTAL LATTICES; DEPOSITION; ELECTRON GUNS; FERROELECTRIC MATERIALS; ION BEAMS; ION BOMBARDMENT; NANOSTRUCTURED MATERIALS; OPTIMIZATION; PLASMAS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB); ION BEAM MILLING; IONIC PLASMAS; NANO-STRUCTURING;

LITHIUM NIOBATE;

EID: 17444362279     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2004.07.016     Document Type: Article

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