Fabrication of arrays of sub-wavelength nano-apertures in an optically thick gold layer on glass slides for optical studies

Nanotechnology

Volumn 16, Issue 5, 2005, Pages

  Perentes, A ^a   Utke, I ^a   Dwir, B ^a   Leutenegger, M ^a   Lasser, T ^a   Hoffmann, P ^a   Baida, F ^b   Bernal, M P ^b   Russey, M ^b   Salvi, J ^b   Van Labeke, D ^b  

^a EPFL   (Switzerland)

^b UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRON BEAM LITHOGRAPHY; GLASS; GOLD; LIGHT TRANSMISSION; NANOTECHNOLOGY;

GLASS SLIDES; NANO-OPTIOCAL APERTURES; OPTICAL CHARACTERIZATION; RESIST STRUCTURES;

OPTICAL DEVICES;

EID: 24144488655     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/5/025     Document Type: Conference Paper

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