Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2784-2787

  Ishida, Masahiko ^a   Fujita, Jun Ichi ^a   Ochiai, Yukinori ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; DENSITY (SPECIFIC GRAVITY); GADOLINIUM; GROWTH (MATERIALS); ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; NATURAL FREQUENCIES; SPUTTERING;

AMORPHOUS CARBON NANOPILLARS; ION BEAM IRRADIATION; PILLAR DENSITY;

CARBON NANOTUBES;

EID: 0036883158     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1526699     Document Type: Article

References (10)

1. A. Wagner, J. P. Levin, J. L. Mauer, P. G. Blauner, S. J. Kirch, and P. Longo, J. Vac. Sci. Technol. B 8, 1557 (1990).
2. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, J. Vac. Sci. Technol. B 18, 3181 (2000).
3. J. Fujita, M. Ishida, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui, J. Vac. Sci. Technol. B 19, 2834 (2001).
4. M. Iwaki and K. Terashima, Surf. Coat. Technol. 128, 429 (2000).
5. S. D. Berger and D. R. McKenzie, Philos. Mag. Lett. 57, 285 (1988).
6. E. W. Wong, P. E. Sheehan, and C. M. Lieber, Science 277, 1971 (1997).
7. Y. Chen, Vibrations; Theoretical Methods (Addison-Wesley, New York, 1966).
8. W. C. Young and R. J. Roark, Formulas for Stress and Strain (McGraw-Hill, New York, 1989).
9. B. Drake, C. B. Prater, A. L. Weisenhorn, S. A. C. Gould, T. R. Albrecht, C. F. Quate, D. S. Cannell, H. G. Hansma, and P. K. Hansm, Science 243, 1586 (1989).
10. J. Fujita, M. Ishida, T. Ichihashi, Y. Ochiai, T. Kaito, and S. Matsui, J. Vac. Sci. Technol. B (to be published).