Capacitive-piezoelectric transducers for high-Q micromechanical AlN resonators

Journal of Microelectromechanical Systems

Volumn 24, Issue 2, 2015, Pages 458-473

  Hung, Li Wen ^a,b   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM   (United States)

Author keywords

aluminum nitride.; electromechanical coupling; equivalent circuit; filter; Micromechanical resonator; oscillator; quality factor; self alignment; small gap

Indexed keywords

ALUMINUM; ALUMINUM NITRIDE; CRYSTAL RESONATORS; ELECTRIC FIELDS; ELECTRIC LOSSES; ELECTRIC RESISTANCE; ELECTRODES; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; ELECTROMECHANICAL FILTERS; EQUIVALENT CIRCUITS; INTERFACES (MATERIALS); NITRIDES; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS; STRENGTH OF MATERIALS; TRANSDUCERS;

ALUMINUM NITRIDE (ALN); FILTER; HIGH ELECTRIC FIELD STRENGTHS; PIEZOELECTRIC RESONATORS; QUALITY FACTORS; SELF ALIGNMENT; SMALL GAPS; THIN FILM PIEZOELECTRIC;

MICROMECHANICAL RESONATORS;

EID: 84926506545     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2332991     Document Type: Article

References (52)

1. A. Gasemi and E. S. Sousa, "Spectrum sensing in cognitive radio networks: Requirements, challenges and design trade-offs, " IEEE Commun. Mag., vol. 46, no. 4, pp. 32-39, Apr. 2008.
2. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized lowpower communication devices, " IEEE Trans. Microw. Theory Techn., vol. 47, no. 8, pp. 1486-1503, Aug. 1999.
3. C. T.-C. Nguyen, "Integrated micromechanical RF circuits for softwaredefined cognitive radio, " in Proc. 26th Symp. Sens., Micromach. Appl. Syst., Tokyo, Japan, Oct. 2009, pp. 1-5.
4. K. Wang and C. T.-C. Nguyen, "High-order medium frequency micromechanical electronic filters, " J. Microelectromech. Syst., vol. 8, no. 4, pp. 534-557, Dec. 1999.
5. R. A. Johnson, Mechanical Filters in Electronics. Hoboken, NJ, USA: Wiley, 1983.
6. T. L. Naing et al., "2.97-GHz CVD diamond ring resonator with Q40, 000, " in Proc. IEEE Int. Freq. Control Symp., Baltimore, MD, USA, May 2012, pp. 570-575.
7. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "An MSI micromechanical differential disk-array filter, " in Proc. 14th Int. Conf. Solid-State Sens. Actuators (TRANSDUCERS), Lyon, France, Jun. 2007, pp. 307-311.
8. T. J. Cheng and S. A. Bhave, "High-Q, low impedance polysilicon resonators with 10 nm air gaps, " in Proc. 23rd IEEE Int. Micro Electro Mech. Syst. (MEMS) Conf., Cancun, Mexico, Jan. 2010, pp. 695-698.
9. M. Akgul, B. Kim, Z. Ren, and C. T.-C. Nguyen, "Capacitively transduced micromechanical resonators with simultaneous low motional resistance and Q70, 000, " in Solid-State Sens., Actuators, Microsyst. Workshop Tech. Dig., Hilton Head, CA, USA, Jun. 2010, pp. 467-470.
10. K. Nai-Kuei et al., "Micromachined sapphire GHz lateral overtone bulk acoustic resonators transduced by aluminum nitride, " in Proc. 25th IEEE Int. Micro Electro Mech. Syst. (MEMS) Conf., Paris, France, Jan./Feb. 2012, pp. 27-30.
11. C.-M. Lin, Y.-Y. Chen, V. V. Felmetsger, D. G. Senesky, and A. P. Pisano, "AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators, " Adv. Mater., vol. 24, no. 20, pp. 2722-2727, May 2012.
12. S. Gong, N.-K. Kuo, and G. Piazza, "GHz high-Q lateral overmoded bulk acoustic-wave resonators using epitaxial SiC thin film, " J. Microelectromech. Syst., vol. 21, no. 2, pp. 253-255, Apr. 2012.
13. J. Masson et al., "High overtone bulk acoustic resonators built using aluminum nitride thin films deposited onto AT-cut quartz plates, " in Proc. IEEE Int. Freq. Control Symp., Miami, FL, USA, Jun. 2006, pp. 835-838.
14. Y.-W. Lin, L.-W. Hung, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Quality factor boosting via mechanically-coupled arraying, " in Proc. Int. Solid-State Sens., Actuators, Microsyst. Conf. (TRANSDUCERS), Lyon, France, Jun. 2007, pp. 2453-2456.
15. R. Abdolvand, H. M. Lavasani, G. K. Ho, and F. Ayazi, "Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications, " IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 55, no. 12, pp. 2596-2606, Dec. 2008.
16. J. Segovia-Fernandez, N.-K. Kuo, and G. Piazza, "Impact of metal electrodes on the figure of merit (kt2•Q) and spurious modes of contour mode AlN resonators, " in Proc. IEEE Ultrason. Symp., Dresden, Germany, Oct. 2012, pp. 299-302.
17. C.-M. Lin, Y.-J. Lai, J.-C. Hsu, Y.-Y. Chen, D. G. Senesky, and A. P. Pisano, "High-Q aluminum nitride lamb wave resonators with biconvex edges, " Appl. Phys. Lett., vol. 99, no. 14, pp. 143501-1-143501-3, 2011.
18. R. J. Besson, "A new 'electrodeless' resonator design, " in Proc. 31st IEEE Int. Freq. Control Symp., 1976, pp. 147-152.
19. L.-W. Hung and C. T.-C. Nguyen, "Capacitive-piezo transducers for higher Q contour-mode AlN resonators at 1.2 GHz, " in Proc. Solid-State Sens., Actuators, Microsyst. Workshop, Hilton Head, CA, USA, Jun. 2010, pp. 463-466.
20. L.-W. Hung and C. T.-C. Nguyen, "Capacitive-Piezoelectric AlN resonators with Q12, 000, " in Proc. 24th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS), Cancun, Mexico, Jan. 2011, pp. 173-176.
21. S. K. Kor, P. K. Mishra, and N. D. Tripathi, "Ultrasonic attenuation in pure and doped n-type silicon, " Phys. Rev. B, vol. 10, no. 2, pp. 775-778, 1974.
22. D. K. Pandey, D. Singh, and R. R. Yadav, "Ultrasonic wave propagation in IIIrd group nitrides, " Appl. Acoust., vol. 68, no. 7, pp. 766-777, 2007.
23. R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, "Effect of phonon interactions on limiting the f.Q product of micromechanical resonators, " in Solid-State Sens., Actuators, Microsyst. Conf. (TRANSDUCERS) Tech. Dig., Lyon, France, 2007, pp. 2131-2134.
24. S. Gong, N.-K. Kuo, and G. Piazza, "GHz AlN lateral overmoded bulk acoustic wave resonators with a f•Q of 1.17 x 1013, " in Proc. Joint IEEE Freq. Control Symp. Eur. Freq. Time Forum, San Francisco, CA, USA, May 2011, pp. 1-5.
25. Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Low phase noise array-composite micromechanical wine-glass disk oscillator, " in IEEE Int. Electron Devices Meet. (IEDM) Tech. Dig., Washington, DC, USA, Dec. 2005, pp. 287-290.
26. F. Ayazi, S. Pourkamali, G. K. Ho, and R. Abdolvand, "High-aspectratio SOI vibrating micromechanical resonators and filters, " in Proc. IEEE MTT-S Int. Microw. Symp., San Francisco, CA, USA, Jun. 2006, pp. 676-679.
27. S. V. Krishnaswamy, J. D. Adam, and M. Aumer, "P1J-4 high-Q FBARs using epitaxial AlN films, " in Proc. IEEE Int. Ultrason. Symp., Vancouver, BC, Canada, Oct. 2006, pp. 1467-1470.
28. A. Frangi, M. Cremonesi, A. Jaakkola, and T. Pensala, "Analysis of anchor and interface losses in piezoelectric MEMS resonators, " Sens. Actuators A, Phys., vol. 190, pp. 127-135, Feb. 2013.
29. C. G. Courcimault and M. G. Allen, "High-Q mechanical tuning of MEMS resonators using a metal deposition-annealing technique, " in 13th Int. Conf. Solid-State Sens., Actuators, Microsyst. Conf. (TRANSDUCERS) Tech. Dig., Jun. 2005, pp. 875-878.
30. T. Nishihara, T. Yokoyama, T. Miyashita, and Y. Satoh, "High performance and miniature thin film bulk acoustic wave filters for 5 GHz, " in Proc. Ultrason. Symp., Munich, Germany, Oct. 2002, pp. 969-972.
31. C.-L. Huang, K.-W. Tray, and L. Wu, "Effect of AlN film thickness and top electrode materials on characteristics of thin-film bulk acoustic-wave resonator devices, " Jpn. J. Appl. Phys., vol. 44, no. 3R, pp. 1397-1402, 2005.
32. M. Ueda et al., "High-Q resonators using FBAR/SAW technology and their applications, " in Dig. IEEE Int. Microw. Symp., Long Beach, CA, USA, Jun. 2005, pp. 209-212.
33. L. Mai, V.-S. Pham, and G. Yoon, "ZnO-based film bulk acoustic resonator devices on a specially designed Bragg reflector, " J. Appl. Phys. A, vol. 95, no. 3, pp. 667-671, 2009.
34. L. Lihua, P. Kumar, L. Calhoun, and D. L. DeVoe, "Piezoelectric Al0.3Ga0.7As longitudinal mode bar resonators, " J. Microelectromech. Syst., vol. 15, no. 3, pp. 465-470, Jun. 2006.
35. J. R. Norton and R. J. Besson, "Tactical BVA quartz resonator performance, " in Proc. 47th IEEE Int. Freq. Control Symp., Salt Lake City, UT, USA, Jun. 1993, pp. 609-613.
36. T. Ikeda, Fundamentals of Piezoelectricity. New York, NY, USA: Oxford Univ. Press, 1990.
37. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Micromechanical 'hollow-disk' ring resonators, " in Proc. 17th IEEE Int. Micro Electro Mech. Syst. Conf., Maastricht, The Netherlands, Jan. 2004, pp. 821-824.
38. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators, " J. Microelectromech. Syst., vol. 15, no. 6, pp. 1406-1418, Dec. 2006.
39. W. Pang, H. Zhang, H. Yu, C.-Y. Lee, and E. S. Kim, "Electrical frequency tuning of film bulk acoustic resonator, " J. Microelectromech. Syst., vol. 16, no. 6, p. 1303-1313, Dec. 2007.
40. C. T.-C. Nguyen, "RF MEMS for channelizing low-power radios, " in Proc. 17th Int. Conf. Solid-State Sens., Actuators, Microsyst. (TRANSDUCERS), Barcelona, Spain, Jun. 2013, pp. 2455-2460.
41. (2010, Jul. 1). Micro Chem: LOR and PMGI Resists [Online]. Available: http://184.168.52.107/pdf/PMGI-Resists-data-sheetV-rhcedit-102206.pdf
42. J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen, "1.51-GHz nanocrystalline diamond micromechanical disk resonator with materialmismatched isolating support, " in Proc. 17th IEEE Int. Micro Electro Mech. Syst. Conf., Maastricht, The Netherlands, Jan. 2004, pp. 641-644.
43. K.Wang, Y. Yu, A.-C.Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators, " in Proc. 12th Int. IEEE Micro Electro Mech. Syst. Conf., Orlando, FL, USA, Jan. 1999, pp. 453-458.
44. J. R. Clark, W.-T. Hsu, M. A. Abdelmoneum, and C. T.-C. Nguyen, "High-Q UHF micromechanical radial-contour mode disk resonators, " J. Microelectromech. Syst., vol. 14, no. 6, pp. 1298-1310, Dec. 2005.
45. C. Zuo, J. Van der Spiegel, and G. Piazza, "1.05 GHz MEMS oscillator based on lateral-field-excited piezoelectric AlN resonators, " in Proc. IEEE Int. Freq. Control Symp., Besancon, France, Apr. 2009, pp. 381-384.
46. P. J. Stephanou and A. P. Pisano, "GHz higher order contour mode ALN annular resonators, " in Proc. IEEE 20th Int. Conf. Micro Electro Mech. Syst. (MEMS), Kobe, Japan, Jan. 2007, pp. 787-790.
47. G. Piazza, P. J. Stephanou, and A. P. Pisano, "One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing, " Solid-State Electron., vol. 51, no. 11, pp. 1596-1608, 2007.
48. F. P. Stratton et al., "A MEMS-based quartz resonator technology for GHz applications, " in Proc. IEEE Int. Freq. Control Symp. Expo., Montreal, QC, Canada, Aug. 2004, pp. 27-34.
49. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, "High frequency micromechanical filters, " IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, Apr. 2000.
50. R. A. Schneider and C. T.-C. Nguyen, "On/off switchable high-Q capacitive-piezoelectric AlN resonators, " in Proc. IEEE 27th Int. Conf. Micro Electro Mech. Syst. (MEMS), San Francisco, CA, USA, Jan. 2014, pp. 1265-1268.
51. T.-T. Yen, A. P. Pisano, and C. T.-C. Nguyen, "High-Q capacitivepiezoelectric AlN lamb wave resonators, " in Proc. IEEE 26th Int. Conf. Micro Electro Mech. Syst. (MEMS), Jan. 2013, pp. 114-117.
52. M. Akgul and C. T.-C. Nguyen, "A passband-corrected high rejection channel-select micromechanical disk filter, " in Proc. IEEE Int. Freq. Control Symp., Taipei, Taiwan, May 2014, pp. 601-606.