On/off switchable high-Q capacitive-piezoelectric AlN resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 1265-1268

  Schneider, Robert A ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING; ENERGY DISSIPATION; MEMS; PIEZOELECTRICITY;

ALN RESONATORS; DISK RESONATOR; MICROMECHANICAL SWITCH; SIGNAL PATHS; SIGNAL TRANSMISSION; SWITCHABILITY; SWITCHABLE; VOLTAGE-CONTROLLED;

RESONATORS;

EID: 84898975272     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765879     Document Type: Conference Paper

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