Electrical frequency tuning of film bulk acoustic resonator

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1303-1313

  Pang, Wei ^a,b   Zhang, Hao ^a,c   Yu, Hongyu ^a   Lee, Chuang Yuan ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

^b BROADCOM CORPORATION   (United States)

^c SKYWORKS SOLUTIONS INC   (United States)

Author keywords

Capacitors; Film bulk acoustic resonator (FBAR); Frequency tuning; Microelectromechanical systems (MEMS) tunable capacitor; Piezoelectric stiffening; Series capacitor

Indexed keywords

AIR-GAP CAPACITOR; FILM BULK ACOUSTIC RESONATOR (FBAR); FREQUENCY TUNING;

ACOUSTIC WAVE PROPAGATION; ELECTRIC FIELDS; ELECTROSTATIC ACTUATORS; MEMS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

ACOUSTIC RESONATORS;

EID: 36949011199     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885846     Document Type: Article

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