GHz AlN lateral overmoded bulk acoustic wave resonators with a f ̇ Q of 1.17 × 1013

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2011, Pages

  Gong, Songbin ^a   Kuo, Nai Kuei ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN THIN FILMS; BULK ACOUSTIC WAVE RESONATOR; COVERAGE RATIO; INTER-DIGITATED TRANSDUCERS; INTRINSIC LOSS; LOSS MECHANISMS; OVERMODED; PRODUCT VALUE; RECTANGULAR PLATES; TEMPERATURE COEFFICIENT OF FREQUENCIES; THEORETICAL LIMITS;

ACOUSTIC WAVES; ACOUSTICS; PHONONS; PLATE METAL; RESONATORS; THIN FILMS; ULTRASONIC TRANSDUCERS;

ACOUSTIC RESONATORS;

EID: 80155213870     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2011.5977846     Document Type: Conference Paper

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