Quality factor boosting via mechanically-coupled arraying

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2453-2456

  Lin, Yu Wei ^a   Hung, Li Wen ^b   Li, Sheng Shian ^a   Ren, Zeying ^a   Nguyen, Clark T C ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Capacitive transducer; Fabrication yield; Micromechanical circuit; Quality factor; Resonator

Indexed keywords

ACTUATORS; BANDPASS FILTERS; COUPLED CIRCUITS; DISKS (STRUCTURAL COMPONENTS); GLASS; KETONES; MICROSYSTEMS; SENSORS; TRANSDUCERS; WINE;

CAPACITIVE TRANSDUCER; COMPOSITE RESONATORS; CONVENIENT METHOD; FABRICATION YIELD; GLASS DISKS; INTERNATIONAL CONFERENCES; LOW-IMPEDANCE; MICRO-MECHANICAL RESONATORS; MICROMECHANICAL CIRCUIT; Q-ENHANCEMENT TECHNIQUES; QUALITY FACTOR; RESONATOR; SOLID-STATE SENSORS;

RESONATORS;

EID: 50049093921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300667     Document Type: Conference Paper

References (6)

1. Y.-W. Lin, et al., "Low phase noise arraycomposite micromechanical wine-glass disk oscillator," Technical Digest, IEDM, Washington, DC, Dec. 2005, pp. 287-290.
2. J. Wang, et al., "1.51-GHz polydiamond micro-mechanical disk resonator with impedancemismatched isolating support," Proceedings, MEMS, Maastricht, The Netherlands, Jan. 2004, pp. 641-644.
3. M. Demirci and C. T.-C. Nguyen, "Mechanically corner-coupled square microresonator array for reduced series motional resistance," IEEE/ASME J. Microelectromech. Syst., vol. 15, no. 6, pp. 1419-1436, Dec. 2006.
4. G. Piazza, et al., "Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators," IEEE/ASME J. Microelectromech. Syst., vol. 15, no. 6, pp. 1406-1418, Dec. 2006.
5. Y.-W. Lin, et al., "Series-resonant VHF micromechanical resonator reference oscillators," IEEE Journal of Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
6. J. Wang, et al., "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason, Ferroelectr., Freq. Control, vol. 51, no. 12, pp. 1607-1628, Dec. 2004.