A MEMS-based quartz resonator technology for GHz applications

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 27-34

  Stratton, Frederic P ^a   Chang, David T ^a   Kirby, Deborah J ^a   Joyce, Richard J ^a   Hsu, Tsung Yuan ^a   Kubena, Randall L ^a   Yong, Yook Kong ^b  

^a Hughes Aircraft Co   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSSEDION-BEAM (FIB) TECHNOLOGY; MONOLITHIC CRYSTAL FILTERS;

COMPUTER SIMULATION; DATA ACQUISITION; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; QUARTZ; SILICON;

OPTICAL RESONATORS;

EID: 28744441979     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Statek Corporation, Technical Note 28, Rev. A, "An Ultra-Miniature Low-Profile AT Quartz Resonator."
2. C. T.-C. Nguyen, "Frequency-Selective MEMS for Miniaturized Low-Power Communication Devices," IEEE Transactions on Microwave Theory and Techniques, vol. 47, no 8, pp. 1486-1503, 1999.
3. D. Chang, F. Stratton, R. Kubena, R. Joyce, "Optimized DRIE Etching of Ultra-Small Quartz Resonators," Proceedings of the 2003 IEEE International Frequency Control Symposium, pp. 829-832, 2003.
4. Takashi Abe, Masayoshi Esashi, "One-chip Multichannel Quartz Crystal Microbalance (QCM) Fabricated by Deep RIE," Sensors and Actuators vol. 82 (2004), pp. 139-143.
5. D.J.D. Carter, J. Kang, D. White, and A.E. Duwel, "Fabrication and Measurement of an IC-Compatible GHz-Range Piezoelectric Longitudinal Bar Resonator," Proceedings of the 2004 MEMS Sensors and Actuators Conference (Hilton Head, S.Carolina).
6. R. Smythe and R. Angove, "Chemically-Milled UHF SC-Cut Resonators," Proceedings of the 1988 IEEE International Frequency Control Symposium, pp. 73-77, 1988.
7. Microchip Technology, Inc. Technical Note AN 588.
8. th Annual Frequency Control Symposium, pp. 103-108