Frequency-selective MEMS for miniaturized low-power communication devices

IEEE Transactions on Microwave Theory and Techniques

Volumn 47, Issue 8, 1999, Pages 1486-1503

  Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OSCILLATORS (ELECTRONIC); TRANSCEIVERS;

MINIATURIZED LOW-POWER COMMUNICATION DEVICES;

RESONATORS;

EID: 0032637099     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.780400     Document Type: Article

References (37)

1. A. M. Niknejad and R. G. Meyer, "Analysis, design, and optimization of spiral inductors and transformers for Si RF IC's," IEEE]. Solid-State Circuits, vol. 33, pp. 1470-1480, Oct. 1998.
2. C. P. Yue and S. S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE J. Solid-State Circuits, vol. 33, pp. 743-751, May 1998.
3. J. Craninckx and M. S. J. Steyaert, "A 1.8-GHz low-phase-noise CMOS VCO using optimized hollow spiral inductors," IEEE J. Solid-State Circuits, vol. 32, pp. 736-744, May 1997.
4. S. V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Yale, and R. A. Moore, "Compact FBAR filters offer low-loss performance," Microwaves RF, vol. 30, no. 9, pp. 127-136, Sept. 1991.
5. R. Ruby and P. Merchant, "Micromachined thin film bulk acoustic resonators," in Proc. IEEE Int. Frequency Control Symp., Boston, MA, June 1-3, 1994, pp. 135-138.
6. A. A. Abidi, "Direct-conversion radio transceivers for digital communications," IEEE J. Solid-State Circuits, vol. 30, pp. 1399-1410, Dec. 1995.
7. D. H. Shen, C.-M. Hwang, B. B. Lusignan, and B. A. Wooley, "A 900-MHz RF front-end with integrated discrete-time filtering," IEEE J. Solid-State Circuits, vol. 31, pp. 1945-1954, Dec. 1996.
8. J. C. Rudell, J.-J. Ou, T. B. Cho, G. Chien, F. Brianti, J. A. Weldon, and P. R. Gray, "A 1.9-GHz wide-band IF double conversion CMOS receiver for cordless telephone applications," IEEE J. Solid-State Circuits, vol. 32, pp. 2071-2088, Dec. 1997.
9. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized communication devices," in Proc. IEEE Aerospace Conf., Snowmass, CO, Mar. 21-28, 1998, pp. 445-460.
10. C. T.-C. Nguyen, L. P. B. Katehi, and G. M. Rebeiz, "Micromachined devices for wireless communications," Proc. IEEE, vol. 86, pp. 1756-1768, Aug. 1998.
11. W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, "Laterally driven polysilicon resonant microstructures," Sens. Actuators, vol. 20, pp. 25-32, 1989.
12. R. T. Howe and R. S. Muller, "Resonant microbridge vapor sensor," IEEE Trans. Electron Devices, vol. ED-33, pp. 499-506, Apr. 1986.
13. C. T.-C. Nguyen and R. T. Howe, "Quality factor control for micromechanical resonators," in IEEE Int. Electron Devices Meeting Tech. Dig., San Francisco, CA, Dec. 14-16, 1992, pp. 505-508
14. _, "Microresonator frequency control and stabilization using an integrated micro oven," in 7th Int. Solid-State Sensors Actuators Conf. Tech. Dig., Yokohama, Japan, June 7-10, 1993, pp. 1040-1043.
15. F. D. Bannon III and C. T.-C. Nguyen, "High frequency microelectromechanical IF filters," IEEE Electron Devices Meeting Tech. Dig., 1 San Francisco, CA, Dec. 8-11, 1996, pp. 773-776.
16. K. Wang and C. T.-C. Nguyen, "High-order micromechanical electronic filters," in Proc., IEEE Int. MEMS Workshop, Nagoya, Japan, Jan. 26-30, 1997, pp. 25-30.
17. J. R. Clark, A.-C. Wong, and C. T.-C. Nguyen, "Parallel-resonator HF micromechanical bandpass filters," in Int. Solid-State Sensors Actuators Conf. Tech. Dig., Chicago, IL, June 16-19, 1997, pp. 1161-1164.
18. C. T.-C. Nguyen, A.-C. Wong, and H. Ding, "Tunable, switchable, high-Q VHP microelectromechanical bandpass filters," in IEEE Int. Solid-State Circuits Conf. Tech. Dig., San Francisco, CA, Feb. 15-17, 1999, pp. 78-79, 448.
19. K. Wang, J. R. Clark, and C. T.-C. Nguyen, "Q-enhancement of micromechanical filters via low-velocity spring coupling," in Proc. IEEE Int. Ultrason. Symp., Toronto, Ont., Canada, Oct. 5-8, 1997.
20. C. T.-C. Nguyen and R. T. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circuits, vol. 34, pp. 44045, Apr. 1999.
21. ___, "Design and performance of monolithic CMOS micromechanical resonator oscillators," in Proc., IEEE Int. Frequency Control Symp. Dig., Boston, MA, May 31-June 3, 1994, pp. 127-134.
22. T. A. Roessig, R. T. Howe, and A. P. Pisano, "Surface-micromachined 1 MHz oscillator with low-noise Pierce configuration," in Solid-State Sensor Actuator Workshop Tech. Dig., Hilton Head, SC, June 8-11, 1998, pp. 328-332.
23. T. A. Core, W. K. Tsang, S. J. Sherman, "Fabrication technology for an integrated surface-micromachined sensor," Solid State Technol., vol. 36, no., 10, pp. 397, Oct. 1993.
24. R. D. Nasby, J. J. Sniegowski, J. H. Smith, S. Montague, C. C. Barron, W. P. Eaton, P. J. McWhorter, D. L. Hetherington, C. A. Apblett, and J. G. Fleming, "Application of chemical-mechanical polishing to planarization of surface-micromachined devices," in Solid-State Sensor Actuator Workshop Tech. Dig., Hilton Head, SC, June 3-6, 1996, pp. 48-53.
25. J. M. Bustillo, G. K. Fedder, C. T.-C. Nguyen, and R. T. Howe, "Process technology for the modular integration of CMOS and polysilicon microstructures," Microsyst. Technol., vol. 1, pp. 30-41, 1994.
26. A. E. Franke, D. Bilic, D. T. Chang, P. T. Jones, T.-J. King, R. T. Howe, and G. C. Johnson, "Post-CMOS integration of germanium microstructures," in I2th Int. IEEE MEMS Conf. Tech. Dig., Orlando, FL, Jan. 17-21, 1999, pp. 630-637.
27. H. Guckel etal., "The mechanical properties of fine-grained polysilicon: The repeatability issue," in IEEE Solid-State Sensor Actuator Workshop Tech. Dig., Hilton Head, SC, June 1988, pp. 96-99.
28. R. A. Johnson, Mechanical Filters in Electronics. New York: Wiley, 1983.
29. A. I. Zverev, Handbook of Filter Synthesis. New York: Wiley, 1967.
30. S. Bouwstra and B. Geijselaers, "On the resonance frequencies of microbridges," in 6th Int. Solid-State Sensors Actuators Conf. Tech. Dig., San Francisco, CA, June 24-27, 1991, pp. 538-542.
31. Q. Meng, M. Mehregany, and R. L. Müllen, "Theoretical modeling of microfabricated beams with elastically restrained supports," J. Microelectromech. Syst., vol. 2, no. 3, pp. 128-137, Sept. 1993.
32. H. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, Jr., "The resonant gate transistor," IEEE Trans. Electron Devices, vol. ED-14, pp. 117-133, Mar. 1967.
33. C. T.-C. Nguyen, "Micromechanical filters for miniaturized low-power communications," Proc. SPIE, to be published.
34. V. B. Braginskky, V. P. Mitrofanov, and V. I. Panov, Systems with Small Dissipation. Chicago, IL: Univ. Chicago Press, 1985.
35. K. Wang, A.-C. Wong, W.-T. Hsu, and C. T.-C. Nguyen, "Frequencytrimming and Q-factor enhancement of micromechanical resonators via localized filament annealing," in Int. Solid-State Sensors Actuators Conf. Tech. Dig., Chicago, IL, June 16-19, 1997, pp. 109-112.
36. K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," in 12th Int. IEEE MEMS Conf. Tech. Dig., Orlando, FL, Jan. 17-21, 1999, pp. 45358.
37. C. T.-C. Nguyen, "Micromechanical signal processors," Ph.D. dissertation, Dept. Elect. Eng. Comput. Sei., Univ. California at Berkeley, Dec. 1994.