Analysis of anchor and interface losses in piezoelectric MEMS resonators

Sensors and Actuators, A: Physical

Volumn 190, Issue , 2013, Pages 127-135

  Frangi, A ^a   Cremonesi, M ^a   Jaakkola, A ^b   Pensala, T ^b  

^a POLITECNICO DI MILANO   (Italy)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHOR LOSS; INTERFACIAL DISSIPATION; NUMERICAL TOOLS; PIEZOELECTRIC MEMS; QUANTITATIVE AGREEMENT; STRESS JUMPS;

MICROELECTROMECHANICAL DEVICES;

PIEZOELECTRICITY;

EID: 84871245645     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.10.022     Document Type: Article

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