Micromechanical "hollow-disk" ring resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 821-824

  Li, Sheng Shian ^a   Lin, Yu Wei ^a   Xie, Yuan ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMUNICATION CHANNELS (INFORMATION THEORY); COMPUTER SIMULATION; ELECTRIC IMPEDANCE; FINITE ELEMENT METHOD; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PERMITTIVITY; POLYSILICON; SCANNING ELECTRON MICROSCOPY; WIRELESS TELECOMMUNICATION SYSTEMS;

RING RESONATORS; SOLID DISK RESONATORS; SPANNING FREQUENCIES; VIBRATION MODES;

RESONATORS;

EID: 3042823603     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. J. Wang, et al., "Self-aligned 1.14-GHz vibrating radial-mode disk resonators," Transducers'03, pp. 947-950.
2. B. Bircumshaw, et al., "The radial bulk annular res.: towards a 50Ω. MEMS filter," Transducers'03, pp. 875-878.
3. M. A. Abdelmoneum, et al., "Stemless wine-glass-mode disk μmechanical resonators," MEMS'03, pp. 698-701.
4. J. Wang, et al., "1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support," MEMS'04, to be published.
5. J. R. Clark, et al., "Parallel-resonator HF micromechanical bandpass filters," Transducers '97, pp. 1161-1164.
6. M. U. Demirci, et al., "Mechanically corner-coupled square microresonator array for reduced series motional resistance," Transducers'03, pp. 955-958.
7. C. V. Stephenson, "Radial Vibrations in Short, Hollow C5ylinders of Barium Titanate," J. Accoust. Soc. Amer, Vol. 28, No. 1, 1956, pp. 51-56.
8. F. D. Bannon, et al., "High-Q HF micromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
9. R. Navid, et al., "Third-order intermodulation distortion in capaci-tively-driven CC-beam micromechanical resonators," MEMS'01, pp. 228-231.
10. A.-C. Wong, et al., "Micromechanical mixer+filters," MEMS'98, pp. 471-474.