Capacitive-piezo transducers for higher Q contour-mode aln resonators at 1.2GHz

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 463-466

  Hung, Li Wen ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; CRYSTAL RESONATORS; ELECTRIC LOSSES; ELECTRIC RESISTANCE; ELECTRODES; III-V SEMICONDUCTORS; MICROSYSTEMS; NITROGEN COMPOUNDS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS;

HIGH ELECTRIC FIELD STRENGTHS; HIGHER FREQUENCIES; MOTIONAL RESISTANCE; PIEZO-TRANSDUCERS; PIEZOELECTRIC RESONATORS; RESONANT STRUCTURES; SERIES RESISTANCES; THIN FILM PIEZOELECTRIC;

SOLID-STATE SENSORS;

EID: 84984960729     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.126     Document Type: Conference Paper

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