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Volumn 44, Issue 3, 2005, Pages 1397-1402

Effect of AlN film thickness and top electrode materials on characteristics of thin-film bulk acoustic-wave resonator devices

Author keywords

Acoustic wave; Piezoelectric; Surface roughness; Thin films

Indexed keywords

ALUMINUM NITRIDE; ELECTRIC CONDUCTIVITY; ELECTRODES; MAGNETRON SPUTTERING; PIEZOELECTRIC DEVICES; RESONATORS; SURFACE ROUGHNESS;

ELECTROMECHANICAL COUPLING COEFFICIENT; QUALITY FACTOR; SPUTTERING PARAMETERS; SURFACE DAMAGE;

THIN FILMS;

EID: 19944385645 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.1397 Document Type: Article

Times cited : (16)

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