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Volumn 2005, Issue , 2005, Pages 278-281

Low phase noise array-composite micromechanical wine-glass disk oscillator

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FEEDBACK CONTROL; OSCILLATORS (ELECTRONIC); PHASE SHIFT; RESONATORS;

EID: 33847735472     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (76)

References (10)
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    • Series-resonant VHF micromechanical resonator reference oscillators
    • Dec
    • Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Series-resonant VHF micromechanical resonator reference oscillators," IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
    • (2004) IEEE J. Solid-State Circuits , vol.39 , Issue.12 , pp. 2477-2491
    • Lin, Y.-W.1    Lee, S.2    Li, S.-S.3    Xie, Y.4    Ren, Z.5    Nguyen, C.T.-C.6
  • 2
    • 0036122670 scopus 로고    scopus 로고
    • Stiffness-compensated temperature-insensitive micromechanical resonators
    • Las Vegas, NV
    • W.-T. Hsu and C. T.-C. Nguyen, "Stiffness-compensated temperature-insensitive micromechanical resonators," Technical Digest, MEMS'02, Las Vegas, NV, 2002, pp. 731-734.
    • (2002) Technical Digest, MEMS'02 , pp. 731-734
    • Hsu, W.-T.1    Nguyen, C.T.-C.2
  • 3
    • 0344088287 scopus 로고    scopus 로고
    • Polycrystalline silicon-germanium films for integrated microsystems
    • April
    • A. E. Franke, J. M. Heck, T.-J. King, and R. T. Howe, "Polycrystalline silicon-germanium films for integrated microsystems," J. Microelectromechanical Systems, vol. 12, no. 2, pp. 160-171, April 2003.
    • (2003) J. Microelectromechanical Systems , vol.12 , Issue.2 , pp. 160-171
    • Franke, A.E.1    Heck, J.M.2    King, T.-J.3    Howe, R.T.4
  • 4
    • 1942424160 scopus 로고    scopus 로고
    • Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
    • April
    • V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," IEEE Electron Device Letters, vol. 25, no. 4, pp. 173-175, April 2004.
    • (2004) IEEE Electron Device Letters , vol.25 , Issue.4 , pp. 173-175
    • Kaajakari, V.1    Mattila, T.2    Oja, A.3    Kiihamäki, J.4    Seppä, H.5
  • 5
    • 0002939906 scopus 로고
    • Fabrication technology for an integrated surface-micromachined sensor
    • Oct
    • T. A. Core, W. K. Tsang, S. J. Sherman, "Fabrication technology for an integrated surface-micromachined sensor," Solid State Technology, vol. 36, no. 10, pp. 39-47, Oct. 1993.
    • (1993) Solid State Technology , vol.36 , Issue.10 , pp. 39-47
    • Core, T.A.1    Tsang, W.K.2    Sherman, S.J.3
  • 7
    • 84944728516 scopus 로고    scopus 로고
    • Mechanically corner-coupled square microresonator array for reduced series motional resistance
    • Boston, MA
    • M. U. Demirci, M. A. Abdelmoneum, and C. T.-C. Nguyen, "Mechanically corner-coupled square microresonator array for reduced series motional resistance," Digest of Technical Papers, Transducers'03, Boston, MA, 2003, pp. 955-958.
    • (2003) Digest of Technical Papers, Transducers'03 , pp. 955-958
    • Demirci, M.U.1    Abdelmoneum, M.A.2    Nguyen, C.T.-C.3
  • 8
    • 33847729283 scopus 로고    scopus 로고
    • S. Lee and C. T.-C. Nguyen, Mechanically-coupled micromechanical resonator arrays for improved phase noise, Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf, Montreal, Canada, Aug. 2004, pp. 280-286.
    • S. Lee and C. T.-C. Nguyen, "Mechanically-coupled micromechanical resonator arrays for improved phase noise," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf, Montreal, Canada, Aug. 2004, pp. 280-286.
  • 9
    • 12344335333 scopus 로고    scopus 로고
    • 1.156-GHz self-aligned vibrating micromechanical disk resonator
    • Dec
    • J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
    • (2004) IEEE Trans. Ultrason., Ferroelect., Freq. Contr , vol.51 , Issue.12 , pp. 1607-1628
    • Wang, J.1    Ren, Z.2    Nguyen, C.T.-C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.