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J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
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F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, "High-Q HF microelectromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
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