Impact of metal electrodes on the figure of merit (kt 2·Q) and spurious modes of contour mode AlN resonators

IEEE International Ultrasonics Symposium, IUS

Volumn , Issue , 2012, Pages 299-302

  Segovia Fernandez, Jeronimo ^a   Kuo, Nai Kuei ^a   Piazza, Gianluca ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

AlN contour mode resonator; electromechanical coupling; metal electrodes; quality factor; spurious modes

Indexed keywords

CONTOUR-MODE RESONATORS; ELECTRODE RESISTANCE; ELECTROMECHANICAL CHARACTERISTICS; FIGURE OF MERITS; INTERFACIAL DISSIPATION; METAL ELECTRODES; QUALITY FACTORS; SPURIOUS MODES;

ELASTIC MODULI; ELECTRODES; ELECTROMECHANICAL COUPLING; RESONATORS;

ELECTROMECHANICAL DEVICES;

EID: 84882420917     PISSN: 19485719     EISSN: 19485727     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2012.0073     Document Type: Conference Paper

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