One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

Solid-State Electronics

Volumn 51, Issue 11-12, 2007, Pages 1596-1608

  Piazza, Gianluca ^a   Stephanou, Philip J ^b   Pisano, Albert P ^c  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b Harmonic Devices Inc   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride; Contour mode resonators; Piezoelectric resonator; RF MEMS

Indexed keywords

MEMS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SIGNAL PROCESSING; WIRELESS TELECOMMUNICATION SYSTEMS;

ALUMINUM NITRIDE; CONTOUR-MODE RESONATORS; PIEZOELECTRIC RESONATORS; RF MEMS;

DIELECTRIC RESONATORS;

EID: 36248984829     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.09.037     Document Type: Article

References (23)

1. Chandrahalim H, Weinstein D, Bhave SA. Thickness shear mode vibrations in silicon bar resonators. Ultrasonics Symposium, 2005 IEEE; 2005. p. 898-901.
2. Dubois M, Billard C, Muller C, Parat G and Vincent P. Integration of high-Q BAW resonators and filters above IC. Solid-state circuits conference, ISSCC 2005; 2005. p. 392-4.
3. Jing W., Butler J.E., Feygelson T., and Nguyen C.-C. 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support. 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 (2004) 641-644
4. Jing W., Ren Z., and Nguyen C.-C. 1.156-GHz self-aligned vibrating micromechanical disk resonator. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 51 (2004) 1607-1628
5. Lakin K.M. A review of thin-film resonator technology. IEEE Microwave Magazine 4 (2003) 61-67
6. Piazza G., Stephanou P.J., and Pisano A.P. Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators. Journal of Microelectromechanical Systems 15 (2006) 1406-1418
7. Pourkamali S., Ho G.K., and Ayazi F. Vertical capacitive SiBARs. 18th IEEE international conference on micro electro mechanical systems, MEMS 2005 (2005) 211-214
8. Ruby R, Merchant P. Micromachined thin film bulk acoustic resonators. Proceedings of the 1994 IEEE international frequency control symposium; 1994. p. 135-8.
9. Weinstein D, Chandrahalim H, Cheow LF, Bhave SA. Dielectrically transduced single-ended to differential MEMS filter, 2006 IEEE, international solid-state circuits conference, ISSCC 2006; 2006. p. 318-9.
10. Yu-Wei L, Sheng-Shian L, Yuan X, Zeying R, Nguyen CTC. Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps, Proceedings of the 2005 IEEE international frequency control symposium and exposition; 2005. p. 128-34.
11. Piazza G, Stephanou PJ, Pisano AP. Aluminum nitride contour-mode vibrating RF MEMS, Microwave symposium digest, 2006, IEEE MTT-S international; 2006. p. 664-7.
12. Piazza G, Stephanou PJ, Porter JM, Wijesundara MBJ, Pisano AP. Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications. 18th IEEE international conference on micro electro mechanical systems, MEMS 2005; 2005. p. 20-3.
13. Piazza G, Stephanou PJ, Wijesundara MBJ, Pisano AP. Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators, The 13th international conference on solid-state sensors, Actuators and Microsystems, TRANSDUCERS'05; 2005. p. 2065-8 vol. 2.
14. Stephanou PJ, Piazza G, White CD, Wijesundara MBJ, Pisano AP. Mechanically coupled contour mode piezoelectric aluminum nitride MEMS filters, 19th IEEE international conference on micro electro mechanical systems, MEMS 2006; 2006. p. 906-9.
15. Stephanou PJ, Pisano AP. GHz Contour extensional mode aluminum nitride MEMS resonators, IEEE Ultrasonics Symposium, 2006. p. 2401-404.
16. Lakin K.M. Equivalent circuit modeling of stacked crystal filters. Proceedings of the thirty fifth annual frequency control symposium (1981) 257-262
17. Cady W.G. Piezoelectricity: an introduction to the theory and applications of electromechanical phenomena in crystals (1946), McGraw-Hill Book Company, Inc., New York
18. Morgan D.P. Surface-wave devices for signal processing (1991), Elsevier, New York
19. Piazza G, Pisano AP. Dry-Released Post-CMOS Compatible contour-mode aluminum nitride micromechanical resonators for VHF applications, 2004 solid-state sensor, actuator and microsystems workshop, Hilton Head 2004; 2004. p. 37-40.
20. Piazza G., and Pisano A.P. Two-port stacked contour-mode aluminum nitride piezoelectric micromechanical resonators. Eurosensors XIX (2005)
21. Zverev A.I. Handbook of filter synthesis (1967), John Wiley and Sons, Inc., New York
22. Ruby R., Bradley P., Clark D., Feld D., Jamneala T., and Kun W. Acoustic FBAR for filters, duplexers and front end modules. 2004 IEEE MTT-S International Microwave Symposium Digest 2 (2004) 931-934
23. Stephanou PJ, Pisano AP. 800 MHz low motional resistance countour-extensional aluminum nitride micromechanical resonators. 2006 Solid-state sensor, actuator and microsystems workshop, Hilton Head 2006; 2006. p. 60-1.