High overtone bulk acoustic resonators built using aluminum nitride thin films deposited onto AT-cut quartz plates

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2006, Pages 835-838

  Masson, J ^a   Gachon, D ^a   Robert, L ^a   Bazin, N ^a   Friedt, J M ^a   Martin, G ^a   Alzuaga, S ^a   Rodolphe, R ^a   Guichardaz, B ^a   Ballandras, S ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; FREQUENCY STABILITY; NATURAL FREQUENCIES; QUARTZ APPLICATIONS; THIN FILMS;

BAW RESONATORS; BULK ACOUSTIC RESONATORS; INTRINSIC MECHANICAL QUALITY FACTORS; THICK AT-CUT QUARTZ PLATES;

ACOUSTIC RESONATORS;

EID: 39049125633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2006.275498     Document Type: Conference Paper

References (5)

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2. st Annual Frequency Control Symposium Proceedings, 1987, pp. 371-381.
3. G. Kline, K. Lakin, and K. McCarron, "Overmoded high Q resonators for microwave oscillators," in IEEE Proc. of the Int. Freq. Contr. Symp., 1993, pp. 718-721.
4. P. Muralt, J. Antifakos, M. Cantoni, R. Lanz, and F. Martin, "Is there a better material for thin film BAW applications than AlN?" in IEEE Proc. of the Ultrason. Symp., 2005, pp. 315-320.
5. A. Reinhardt, T. Pastureaud, S. Ballandras, and V. Laude, "Scattering matrix method for modelling acoustic waves in piezoelectric, fluid, and metallic multilayers," J. of Applied Physics, vol. 94, no. 10, 2003.