High-aspect-ratio SOI vibrating micromechanical resonators and filters

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 676-679

  Ayazi, Farrokh ^a   Pourkamali, Siavash ^a   Ho, Gavin K ^a   Abdolvand, Reza ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bulk acoustic wave resonator; MEMS; Micromechanical filters; Micromechanical resonators; SOI

Indexed keywords

ELECTRIC FILTERS; PIEZOELECTRIC TRANSDUCERS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

BULK ACOUSTIC WAVE RESONATORS; INTEGRATED SILICON RESONATORS; MICROMECHANICAL FILTERS; MICROMECHANICAL RESONATORS;

CRYSTAL RESONATORS;

EID: 34250349556     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249705     Document Type: Conference Paper

References (13)

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