Piezoelectric Al0.3Ga0.7As longitudinal mode bar resonators

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 465-470

  Li, Lihua ^a   Kumar, Parshant ^a   Calhoun, Lynn ^b   De Voe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

Piezoelectric; Radio frequency microelectromechanical systems (RF MEMS); Resonator

Indexed keywords

NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SEMICONDUCTING ALUMINUM COMPOUNDS; SINGLE CRYSTALS; THERMODYNAMIC STABILITY; THIN FILMS;

MODE BAR RESONATORS; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; THIN FILM SINGLE CRYSTAL;

MICROELECTROMECHANICAL DEVICES;

EID: 33744470200     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876654     Document Type: Article

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