Capacitively transduced micromechanical resonators with simultaneous low motional resistance and Q > 70,000

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 467-470

  Akgul, Mehmet ^a   Kim, Bongsang ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COGNITIVE RADIO; HIGH-K DIELECTRIC; MICROSYSTEMS; SOFTWARE RADIO; SOLID-STATE SENSORS;

CHANNELIZERS; GAP FILLING; HIGH IMPEDANCE; MICROMECHANICAL DISK RESONATORS; MOTIONAL RESISTANCE; PARTIAL ELECTRODES; SOFTWARE-DEFINED RADIO ARCHITECTURES; SURFACE LOSS;

MICROMECHANICAL RESONATORS;

EID: 84876271272     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.127     Document Type: Conference Paper

References (18)

1. Ruby R.C., et al., “Thin Film Bilk Wave Acoustic Resonators for Wireless…”, Ultrasonic Sym., 2001 IEEE, Vol.1, pp. 813-821
2. G. Piazza, “Integrated Aluminum Nitride Piezoelectric MEMS …”, J. of Vac. Sci. Technol. A, 2009, Vol. 27, No. 4, pp 776-784
3. Yue C.P., et al., “On-chip spiral inductors with patterned ground …”, IEEE J. of Solid-State Cir., 1998, Vol.33, no 5,pp. 743-752
4. S.-S. Li, et al., “Micromechanical Hollow-Disk…,” Proceedings, 17th Int. IEEE MEMS Conf., Jan. 25-29, 2004, pp. 821-824.
5. C. T.-C. Nguyen, “Integrated micromechanical RF…”, 26th Sym. on Sensors, Micromachines & App. Sys., Tokyo, 2009, pp. 1-5.
6. Y.-W. Lin, et al., “Series-resonant VHF micromechanical res…,” IEEE J. Solid-State Cir., vol. 39, no. 12, pp. 2477-2491, 2004.
7. S.-S. Li, et al., “Self-switching vibrating micro…”, IEEE Int. Freq. Cont./Pre. T. & T. Int. Sym., Canada, 2005, pp. 135-141.
8. Hung L.-W., et al., “Capacitive Transducer Strengthening Via ALD-Enabled Partial-Gap Filling”, Hilton-Head’08.
9. Y.-W. Lin, et al., “Third-order intermodulation distortion in ca-pacitively…”, IEEE Int. Ultrasonics Sym., 2005, pp. 1592-1595.
10. Tiffany J. Cheng, Sunil Bhave, “High-Q, low impedance polysilicon resonators with 10nm air gaps”, MEMS’10, pp. 695-698.
11. Hung L.-W., et al., “Silicide-Based Release of High Aspect-Ratio Microstructures”, MEMS 2010, Hong Kong, pp. 120-123
12. Y.-W. Lin, et al., “Vibrating micromechanical resonators…”, IEEE Int. Freq. Cont./Prec. T. & T. Int. Sym., 2005, pp. 128-134.
13. Markku Leskela, Mikko Ritala,“Atomic layer deposition (ALD): from precursors…”, Thin Solid Films, 2002, pp.138-146.
14. H. Cheng, et al., “Substrate Materials and Deposition Temperature Dependent…”, Jou. of The Electrochem. Soc., v.156, 2009.
15. 3…”, Surface Sci., vol. 322, Jan. 1995.
16. 3 films …”, Thin Solid Films, vol. 413, Jun. 2002.
17. M. A. Abdelmoneum, et al., “Stemless wine-glass-mode disk micromechanical reson.”, MEMS’03, Kyoto, Japan, pp. 698-701.
18. Y. Xie, et al., “UHF Micromechanical Extensional Wine-Glass Mode Ring Resonators”, IEDM 2003, Washington, pp. 953-956.