Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1406-1418

  Piazza, Gianluca ^a   Stephanou, Philip J ^b   Pisano, Albert P ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride; Contour mode resonators; Microelectromechanical systems (MEMS) resonators; Piezoelectric resonators; Radio frequency (RF) MEMS

Indexed keywords

ALUMINUM NITRIDE; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL EFFECTS;

CONTOUR-MODE RESONATORS; PIEZOELECTRIC RESONATORS;

RESONATORS;

EID: 33845538685     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.886012     Document Type: Article

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