High performance and miniature thin film bulk acoustic wave filters for 5 GHz

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 969-972

  Nishihara, T ^a   Yokoyama, T ^a   Miyashita, T ^a   Satoh, Y ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC RESONATORS; ALUMINUM NITRIDE; BANDWIDTH; FILM GROWTH; FLIP CHIP DEVICES; INTEGRATED CIRCUIT LAYOUT; LOCAL AREA NETWORKS; MICROMACHINING; THIN FILMS; WIRELESS TELECOMMUNICATION SYSTEMS;

EPITAXIAL ALUMINUM NITRIDE FILM-GROWTH; REACTANCE-CONTROLLED FLIP-CHIP PACKAGE DESIGN; THIN FILM BULK ACOUSTIC RESONATORS; THIN FILM BULK ACOUSTIC WAVE FILTERS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0036989405     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. K. M. Lakin, "Thin Film Resonators and Filters", Proc. IEEE Ultrasonics Sympium, 1999, pp. 895-906.
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3. R. Ruby, P. Bradley, Y. Oshmyansky, and A. Chien, "IRE Standards on Piezoelectric Crystals: Measurements of Piezoelectric Ceramics, 1961" 61 IRE 14.S1, eq.13, 1961, IEEE, 442 Hoes Lane, Piscataway, N. J.
4. M.-A. Dubois, P. Muralt and L. Sagalowicz, "Aluminum Nitride Thin Films for High Frequency Applications", Ferroelectrics, 1999, Vol. 224, pp. 243-250.
5. J. Larson, P. Bradley, S. Wartenberg, and R. Ruby, "Modified Butterworth-Van Dyke Circuit for FBAR Resonators and Automated Measurement System", Proc. IEEE Ultrasonics Sympium, 2000, pp. 863-868.
6. Y. Satoh, O. Ikata, T. Miyashita, and H. Ohmori, "RF SAW Filters", International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems, 2001, pp. 125-132.