High-q resonators using FBAR/SAW technology and their applications

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 209-212

  Ueda, Masanori ^a   Nishihara, Tokihiro ^b   Tsutsumi, Jun ^b   Taniguchi, Shinji ^b   Yokoyama, Tsuyoshi ^b   Inoue, Shogo ^b   Miyashita, Tsutomu ^a   Satoh, Yoshio ^b  

^a FUJITSU LABORATORIES LTD   (Japan)

^b Fujitsu Media Devices Limited ^*

Author keywords

AlN; Duplexer; FBAR; Filter; Q factor; Resonator; Ru; SAW

Indexed keywords

ACOUSTIC IMPEDANCE; ALUMINUM NITRIDE; ELECTRODEPOSITION; ELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; RUTHENIUM;

DUPLEXERS; ELECTRODE MATERIALS; ELECTROMECHANICAL COUPLING;

RESONATORS;

EID: 33749238742     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516561     Document Type: Conference Paper

References (15)

1. O. Ikata, T. Miyashita, T. Matsuda, T. Nishihara and Y. Satoh, IEEE Proc. Ultrason. Symp., pp.111-115,(1992).
2. T. Matsuda, J. Tsutsumi, S. Inoue, Y. Iwamoto, Y.Satoh, M. Ueda and O. Ikata, IEE Proc.Ultrason.Symp.,pp.68-73, (2002).
3. P.D. Bradley, R. Ruby, A. Barfknecht, F. Geefay, C.Han, G. Gan, Y. Oshmyansky and J.D. Larson III, IEEE Proc. Ultrason. Symp., pp.907-910, (2002).
4. K.M. Lakin, Proc. IEEE Ultrason. Symp., 1999, pp. 895-906.
5. T. Nishihara, T. Yokoyama, T. Miyashita and Y. Satoh IEEE Ultrason. Symp., 2004, pp. 969-972.
6. R. Aigner, Proc. IEEE MEE-S Int'l. Microwave Symp. Workshop Note & Short Courses, WMB-14, 2004.
7. R. Ruby, P. Bradley, Y. Oshmyansky, and A. Chien, Proc. IEEE Ultrason. Symp., 2001, pp. 813-821.
8. M.Ueda J. Tsutsumi, S. Inoue, Y. Iwamoto, T. Matsuda, Y.Satoh, and O. Ikata, IEEE MTT-S Int. Microwave. Symp., 2004,pp913-916.
9. T. Yokoyama, T. Nishihara, S. Taniguchi, M. Iwaki, Y. Satoh, M. Ueda and T. Miyashita IEE Proc. 2004 IEEE Freq. Cont. symp., 2004, in press.
10. Si-Hyung Lee, Jeon-Kook Lee, and Ki Hyun Yoon, J. Vac. Sci. Technol. A21, 2003,pp. 1-5.
11. J. Larson, P. Bradley, S. Wartenberg, and R. Ruby, Proc. IEEE Ultrason. Symp, 2000, pp. 863-868.
12. A. Miyamoto, S. Wakana and A. Ito, IEEE Proc. Ultrason. Symp., pp.86-89, (2002).
13. S. Inoue, J. Tsutsumi, T. Matsuda, Y. Iwamoto, Y.Satoh, M. Ueda and O. Ikata, IEE Proc.Ultrason.Symp.,(2003).
14. M. Miura, T. Matsuda, Y. Satoh, M. Ueda, O. Ikata, Y. Ebata and H. Takagi, Proc. 2004 IEEE Freq. Cont. symp., 2004, in press.
15. J. Tsutsumi, S. Inoue, Y. Iwamoto, M. Miura, T. Matsuda Y.Satoh, T. Nishizawa, M. Ueda and O. Ikata, Proc. 2004 IEEE Freq. Cont. symp., 2004, in press.