High-Q aluminum nitride Lamb wave resonators with biconvex edges

Applied Physics Letters

Volumn 99, Issue 14, 2011, Pages

  Lin, Chih Ming ^a,b   Lai, Yun Ju ^a,b   Hsu, Jin Chen ^c   Chen, Yung Yu ^d   Senesky, Debbie G ^a,b   Pisano, Albert P ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^d TATUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; LAMB WAVE RESONATORS; MECHANICAL ENERGIES; QUALITY FACTORS; SIMULATION RESULT;

ALUMINUM; ELASTIC WAVES; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; NITRIDES; RESONATORS; ULTRASONIC WAVES; WAVE PROPAGATION;

ALUMINUM NITRIDE;

EID: 80053994568     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3643153     Document Type: Article

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