GHz higher order contour mode AlN annular resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 787-790

  Stephanou, P J ^a,b   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Harmonic Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; BACTERIOPHAGES; III-V SEMICONDUCTORS; NATURAL FREQUENCIES; RESONATORS;

ALUMINUM NITRIDE (ALN); ANNULAR RESONATORS; DEVICES UNDER TESTS; FIGURE OF MERITS; MOTIONAL RESISTANCE; SERIES RESONANT FREQUENCY; SPURIOUS RESPONSE; STRUCTURAL LAYERS;

MEMS;

EID: 52249111134     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433093     Document Type: Conference Paper

References (9)

1. K.M. Lakin et al., "Development of Miniature Filters for Wireless Applications," IEEE Trans. on Microwave Theory and Tech., vol. 43, no. 12, pp. 2933-2939, 1995.
2. Y.-W. Lin, C.T.-C. Nguyen, et al., "Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps," IEEE Proc. Freq. Cont. Symposium and Exhibition, pp. 128-134, 2005.
3. V. Yantchev and I. Katardjiev, "Design and Fabrication of Thin Film Lamb Wave Resonators Utilizing Longitudinal Wave and Interdigital Transducers," Proc. IEEE Ultrasonics Symposium, pp 1581-1583, 2005.
4. W.-T. Hsu, "Vibrating RF MEMS for Timing and Frequency References," Proceedings of IEEE MTT-S IMS2006, 2006, pp. 672-675.
5. H. Chandrahalim, S.A. Bhave et al., IEEE Proc. MEMS'06, pp. 894-897, 2006.
6. G. Piazza, et al., "Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications," IEEE MEMS 2005, pp. 20-23, 2005.
7. P.J. Stephanou and A.P. Pisano, "800 MHz Low Motional Resistance Contour-Extensional Aluminum Nitride Micromechanical Resonators," 2006 Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, SC, pp. 60-61, 2005.
8. P.J. Stephanou, A.P. Pisano, "GHz Contour Extensional Mode Aluminum Nitride MEMS Resonators," Proceedings of IEEE Ultrasonics Symposium, to be published October 2006.
9. G. Piazza, et al., "Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators," Transducers 2005, pp. 2065-2068, 2005.