High-Q UHF micromechanical radial-contour mode disk resonators

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1298-1310

  Clark, John R ^a,b   Hsu, Wan Thai ^a,b   Abdelmoneum, Mohamed A ^a,c   Nguyen, Clark T C ^a,d  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Discera Inc   (United States)

^c INTEL CORPORATION   (United States)

^d DEFENSE ADVANCED RESEARCH PROJECTS AGENCY   (United States)

Author keywords

Electromechanical coupling; Microelectromechanical devices; Microelectromechanical system (MEMS); Microresonator; Quality factor; Resonator; UHF; VHF

Indexed keywords

ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS PACKAGING; ELECTROPLATING; MICROMACHINING; POLYSILICON; RESONATORS; UHF DEVICES;

ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL MIXING; METAL ELECTROPLATING; MICROMECHANICAL DISK RESONATORS; PARASITIC EFFECT; POLYSILICON SURFACE-MICROMACHINING; QUALITY FACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 29244491145     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.856675     Document Type: Article

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