An MSI micromechanical differential disk-array filter

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 307-311

  Li, Sheng Shian ^a   Lin, Yu Wei ^a   Ren, Zeying ^a   Nguyen, Clark T C ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Array composite; Differential; Feedthrough; High Q; Low loss; Micromechanical filter

Indexed keywords

ACTUATORS; BANDPASS FILTERS; DISKS (STRUCTURAL COMPONENTS); MICROSYSTEMS; RESONATORS; SENSORS; TELECOMMUNICATION SYSTEMS; TRANSDUCERS; WAVE FILTERS;

ARRAY-COMPOSITE; CIRCUIT DESIGNS; DIFFERENTIAL; DIFFERENTIAL-MODE; FEEDTHROUGH; FILTER CIRCUITS; FILTER RESPONSE; HIGH-Q; INSERTION LOSSES; INTERNATIONAL CONFERENCES; LINK ELEMENTS; LOW LOSS; MICRO-MECHANICAL; MICROMECHANICAL FILTER; MOTIONAL RESISTANCE; ON CHIPS; RESONATOR COUPLING; SOLID-STATE SENSORS; STOPBAND REJECTION; TO EFFECT;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 50049120278     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300130     Document Type: Conference Paper

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