1.05 GHz MEMS oscillator based on lateral-field-excited piezoelectric AlN resonators

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 381-384

  Zuo, Chengjie ^a   Spiegel, Jan Van Der ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN RESONATORS; CMOS PROCESSS; CONTOUR-MODE RESONATORS; GHZ FREQUENCIES; LOCAL OSCILLATORS; MANUFACTURING TOLERANCES; MASK PROCESS; MEMS OSCILLATORS; MICRO-ELECTRO-MECHANICAL; MULTIBAND; OFFSET FREQUENCIES; ON CHIPS; PHASE-NOISE LEVELS; POST-CMOS; RE-CONFIGURABLE; STATIC POWER; ULTRA-HIGH FREQUENCY; WIRELESS COMMUNICATIONS;

ALUMINUM NITRIDE; MEMS; MICROELECTROMECHANICAL DEVICES; NITRIDES; PHASE NOISE; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS; WIRELESS TELECOMMUNICATION SYSTEMS;

OSCILLATORS (ELECTRONIC);

EID: 70449490656     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168205     Document Type: Conference Paper

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