High-q mechanical tuning of mems resonators using a metal deposition - Annealing technique

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 875-878

  Courcimault, Christophe G ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Annealing; High Q resonators; Mechanical tuning; Metal deposition

Indexed keywords

HIGH-Q RESONATORS; MECHANICAL TUNING; METAL DEPOSITION; MICRORESONATORS;

ANNEALING; DEPOSITION; NATURAL FREQUENCIES; RESONANCE; RESONATORS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TUNING;

MICROELECTROMECHANICAL DEVICES;

EID: 27544500860     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496557     Document Type: Conference Paper

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