AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators

Advanced Materials

Volumn 24, Issue 20, 2012, Pages 2722-2727

  Lin, Chih Ming ^a   Chen, Yung Yu ^b   Felmetsger, Valery V ^c   Senesky, Debbie G ^d   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TATUNG UNIVERSITY   (Taiwan)

^c OEM Group Incorporated   (United States)

^d 496 Lomita Mall   (United States)

Author keywords

aluminum nitride; cubic silicon carbide; high quality factor; high order Lamb wave modes; Lamb wave resonator; piezoelectric thin film

Indexed keywords

CUBIC SILICON CARBIDE; HIGH QUALITY FACTORS; LAMB WAVE MODE; LAMB WAVE RESONATORS; PIEZOELECTRIC THIN FILMS;

ALUMINUM NITRIDE; MICROMECHANICAL RESONATORS; NANOCOMPOSITE FILMS; PIEZOELECTRICITY; THIN FILMS;

SILICON CARBIDE;

ALUMINUM DERIVATIVE; ALUMINUM NITRIDE; INORGANIC COMPOUND; SILICON CARBIDE; SILICON DERIVATIVE; ZINC OXIDE;

ARTICLE; CHEMISTRY; STATIC ELECTRICITY;

ALUMINUM COMPOUNDS; CARBON COMPOUNDS, INORGANIC; SILICON COMPOUNDS; STATIC ELECTRICITY; ZINC OXIDE;

EID: 84861134833     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201104842     Document Type: Article

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