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Applied Physics A: Materials Science and Processing

Volumn 95, Issue 3, 2009, Pages 667-671

ZnO-based film bulk acoustic resonator devices on a specially designed Bragg reflector

(3) Mai, Linh a,b Pham, Van Su a Yoon, Giwan a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

b INTERNATIONAL UNIVERSITY (Viet Nam)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION LAYERS; ELECTRO-MECHANICAL COUPLING COEFFICIENTS; FILM BULK ACOUSTIC RESONATORS; MULTI-LAYERED; OPERATING FREQUENCIES; QUALITY FACTORS; RESONANT CHARACTERISTICS; RETURN LOSS; THERMAL TREATMENTS; ZNO;

ACOUSTIC SURFACE WAVE FILTERS; ACOUSTICS; BRAGG REFLECTORS; CHROMIUM; ELECTROMECHANICAL DEVICES; REFLECTION; RESONATORS; SEMICONDUCTING ZINC COMPOUNDS; ZINC OXIDE;

ACOUSTIC RESONATORS;

EID: 63949085104 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5142-1 Document Type: Article

Times cited : (12)

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