VHF free-free beam high-Q micromechanical resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 453-458

  Wang, Kun ^a   Yu, Yinglei ^a   Wong, Ark Chew ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON;

MICROMECHANICAL ACTUATORS;

RESONATORS;

EID: 0032626715     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)