2.97-GHz CVD diamond ring resonator with Q >40,000

2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

Volumn , Issue , 2012, Pages 565-570

  Naing, Thura Lin ^a   Beyazoglu, Turker ^a   Wu, Lingqi ^a   Akgul, Mehmet ^a   Ren, Zeying ^a   Rocheleau, Tristan O ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

CVD diamond; filter; MEMS; micromechanical; oscillator; quality factor; resonator; RF MEMS; ring resonator

Indexed keywords

CVD DIAMOND; FILTER; MICRO-MECHANICAL; QUALITY FACTORS; RF-MEMS; RING RESONATOR;

MEMS; OPTICAL RESONATORS; OSCILLATORS (ELECTRONIC); RESONATORS;

MICROMECHANICAL RESONATORS;

EID: 84866654242     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2012.6243723     Document Type: Conference Paper

References (20)

1. D.B. Leeson, "A simple model of feedback oscillator noise spectrum," Proc. IEEE, vol.54, no.2, pp. 329-330, Feb. 1966.
2. G. R. Kline, K. M. Lakin, and K. T. McCarron, "Overmoded high Q resonators for microwave oscillators," in Proc. IEEE Int. Frequency Control Symposium, 1993, pp. 718-721.
3. E. Hwang and S. A. Bhave, "Transduction of High-Freq. Micromechanical Resonators Using Depletion Forces in p-n Diodes," IEEE Trans. on Electron Devices, vol. 58, no. 8, pp. 2770-2776, Aug. 2011.
4. S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Micromechanical 'hollow-disk' ring resonators," in Proc. IEEE Int. Micro Electro Mechanical Systems, 2004, 2004, pp. 821-824.
5. R. Tabrizian, et al., "Effect of phonon interactions on limiting the f.Q product of micromechanical resonators," in IEEE Int. Conf. on Solid-State Sensors, Actuators (Transducer '09). pp. 2131-2134.
6. V.B. Braginsky, et al., System with Small Dissipation, The University of Chicago Press, 1985.
7. A. Iula, et al., "A model for the theoretical characterization of thin piezoceramic rings," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, vol.43, no.3, pp. 370-375, May 1996.
8. C. V. Stephenson, "Radial vibrations in short, hollow cylinders of Barium Titanate," J. Acoust. Soc. Amer., vol.28, no.1, pp.51-56, Jan. 1956.
9. C. T.-C. Nguyen, "Integrated micromechanical RF circuits for software-defined cognitive radio (invited plenary)," Proceedings, the 26th Symposium on Sensors, Micromachines & Applied Systems, Tokyo, Japan, Oct. 15-16, 2009, pp. 1-5.
10. M. Akgul, et al, "Hot filament CVD conductive microcrystalline diamond for high Q, high acoustic velocity micromechanical resonators," in IEEE Int. IFCS-EFTF, 2011, pp. 1-6.
11. R. A. Johnson, Mechanical Filters in Electronics. New York, NY: Wiley, 1983.
12. T. O. Rocheleau, T. L. Naing, Z. Ren, and C. T.-C. Nguyen, "Acoustic whispering gallery mode resonator with Q >109,000 at 515MHz," in IEEE Int. Conf. on MEMS, 2012, pp. 672-675.
13. J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. UFFC, vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
14. J. R. Clark, et al., "High-Q UHF micromechanical radial-contour mode disk resonators," J. Microelectromechanical Systems, vol.14, no.6, pp. 1298-1310, Dec. 2005.
15. A.-C. Wong and C. T.-C. Nguyen, "Micromechanical mixer-filters ('mixlers')," J. Microelectromechanical Systems, vol. 13, no. 1, pp. 100-112, Feb. 2004.
16. C.-M. Lin, et al., "AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators," Adv. Mater., vol. 24, no. 20, pp. 2722-2727, May 2012.
17. A. Nelson, J. Hu, J. Kaitila, R. Ruby, and B. Otis, "A 22μW, 2.0GHz FBAR oscillator," in Radio Frequency Integrated Circuits Symposium (RFIC), 2011 IEEE, 2011, pp. 1-4.
18. H. Kim, et al., "A Low Phase Noise LC VCO in 65 nm CMOS Process Using Rectangular Switching Technique," IEEE Lett. Microwave and Wireless Components, vol. 17, no. 8, pp. 610-612, Aug. 2007.
19. M. Akgul, B. Kim, Z. Ren, and C. T.-C. Nguyen, "Capacitively transduced micromech. resonators w/ simultaneous low motional resistance and Q>70,000," Proc., Hilton-Head Conf., Jun. 2010, pp.467-470.
20. Y.-W. Lin, S.-S. Li, Z. Ren, and C. T. C. Nguyen, "Low phase noise array-composite micromechanical wine-glass disk oscillator," in IEEE Int. Tech. Dig., Electron Devices Meeting, 2005., pp. 287-290.