High-order medium frequency micromechanical electronic filters

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 534-557

  Wang, Kun ^a   Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INSERTION LOSSES; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; RESONATORS; SILICON;

MICROELECTROMECHANICAL BANDPASS FILTERS;

BANDPASS FILTERS;

EID: 0033338623     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809070     Document Type: Article

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